Low-Loss, Low-Crosstalk Arrayed Waveguide Grating on a 300 mm Silicon Photonics Platform

IF 2.4 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

IEEE Photonics Technology Letters Pub Date : 2026-02-17 DOI:10.1109/LPT.2026.3665778

Mohammad Jobayer Hossain;Javery A. Mann;Amit Dikshit;Jin Wallner;Gerald J. Leake;Christopher V. Baiocco

引用次数: 0

Abstract

We present a

$1\times 13$

channel silicon nitride arrayed waveguide grating (AWG) fabricated on a 300 mm silicon photonics platform. The device operates across the C and L bands (1500–1620 nm) with a measured insertion loss of 0.92 dB and a crosstalk of –37.5 dB (median across 29 dies on the wafer). Each channel exhibits a 3 dB bandwidth of 118.6 GHz, with a channel spacing of 187 GHz. The free spectral range (FSR) of the AWG is 20 nm. The device footprint is compact, measuring 1.65 mm

$\times 0.75$

mm. Fabrication was carried out using AIM Photonics’ 300 mm CMOS-compatible process at the Albany Nanotech Complex. This work presents the design, fabrication, and characterization of the AWG, including an analysis of die-to-die performance variations.

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300毫米硅光子平台上的低损耗、低串扰阵列波导光栅

我们提出了一个$1\ × 13$通道的氮化硅阵列波导光栅（AWG），它是在300 mm硅光子平台上制造的。该器件工作在C和L波段（1500-1620 nm），测量插入损耗为0.92 dB，串扰为-37.5 dB（晶圆上29个芯片的中位数）。每个通道的3db带宽为118.6 GHz，通道间隔为187ghz。AWG的自由光谱范围（FSR）为20 nm。该器件占地面积非常小，尺寸为1.65 mm × 0.75 mm。在奥尔巴尼纳米技术综合体使用AIM Photonics的300 mm cmos兼容工艺进行制造。这项工作介绍了AWG的设计、制造和表征，包括对模具到模具性能变化的分析。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

IEEE Photonics Technology Letters 工程技术-工程：电子与电气

CiteScore

5.00

自引率

3.80%

发文量

404

审稿时长

2.0 months

期刊介绍： IEEE Photonics Technology Letters addresses all aspects of the IEEE Photonics Society Constitutional Field of Interest with emphasis on photonic/lightwave components and applications, laser physics and systems and laser/electro-optics technology. Examples of subject areas for the above areas of concentration are integrated optic and optoelectronic devices, high-power laser arrays (e.g. diode, CO2), free electron lasers, solid, state lasers, laser materials'' interactions and femtosecond laser techniques. The letters journal publishes engineering, applied physics and physics oriented papers. Emphasis is on rapid publication of timely manuscripts. A goal is to provide a focal point of quality engineering-oriented papers in the electro-optics field not found in other rapid-publication journals.