Generalized ripple suppression algorithm for phase-shift interferometric wavefronts

IF 3.7 2区工程技术 Q2 OPTICS

Optics and Lasers in Engineering Pub Date : 2026-06-01 Epub Date: 2026-02-04 DOI:10.1016/j.optlaseng.2026.109674

Yuqing Liu, Donghui Zheng, Lei Chen, Zhe Zhang

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引用次数: 0

Abstract

In phase-shifting interferometry using narrow-bandwidth light sources, ripple noise introduced by multiple error sources is one of the key factors limiting its wavefront calculation accuracy, this study proposed a generalized ripple suppression algorithm (GRSA) in its standard measurement scenarios. The distribution law of ripple errors caused by different error sources were investigated, and a mathematical model was established to decompose the wavefront shape components. The ripple components in wavefronts can be calculated and directly subtracted via two least-squares fittings on multiple wavefronts containing different ripple errors. Feasibility of the GRSA was verified through simulations and experiments, and the root mean square error of the simulated wavefront reaches 2.1 × 10⁻⁵λ. Factors affecting the accuracy of phase calculation and several special cases were analyzed, and optimization schemes for algorithm parameters were provided based on the analysis results. The experimental and simulation results show that the GRSA can effectively improve measurement accuracy and repeatability by suppressing the ripple error in the wavefront.

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相移干涉波前的广义纹波抑制算法

在窄带光源移相干涉测量中，多误差源引入的纹波噪声是限制其波前计算精度的关键因素之一，本研究在其标准测量场景下提出了一种广义纹波抑制算法（GRSA）。研究了不同误差源引起的纹波误差分布规律，建立了分解波前形状分量的数学模型。在包含不同纹波误差的多个波前上，通过两个最小二乘拟合，可以计算并直接减去波前的纹波分量。通过仿真和实验验证了GRSA的可行性，模拟波前的均方根误差达到2.1 × 10−5λ。分析了影响相位计算精度的因素和几种特殊情况，并根据分析结果提出了算法参数的优化方案。实验和仿真结果表明，GRSA可以有效地抑制波前纹波误差，提高测量精度和可重复性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Optics and Lasers in Engineering 工程技术-光学

CiteScore

8.90

自引率

8.70%

发文量

384

审稿时长

42 days

期刊介绍： Optics and Lasers in Engineering aims at providing an international forum for the interchange of information on the development of optical techniques and laser technology in engineering. Emphasis is placed on contributions targeted at the practical use of methods and devices, the development and enhancement of solutions and new theoretical concepts for experimental methods. Optics and Lasers in Engineering reflects the main areas in which optical methods are being used and developed for an engineering environment. Manuscripts should offer clear evidence of novelty and significance. Papers focusing on parameter optimization or computational issues are not suitable. Similarly, papers focussed on an application rather than the optical method fall outside the journal''s scope. The scope of the journal is defined to include the following: -Optical Metrology- Optical Methods for 3D visualization and virtual engineering- Optical Techniques for Microsystems- Imaging, Microscopy and Adaptive Optics- Computational Imaging- Laser methods in manufacturing- Integrated optical and photonic sensors- Optics and Photonics in Life Science- Hyperspectral and spectroscopic methods- Infrared and Terahertz techniques