Phase engineering of MoS2 via Ar/O2 plasma treatment

IF 2.7 4区材料科学 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY

Materials Letters Pub Date : 2026-05-01 Epub Date: 2026-02-06 DOI:10.1016/j.matlet.2026.140225

Joonsoo Byeon, Ha Yeon Choi, Ju Yong Shin, Seung Ri Jeong, Shivam Kumar Gautam, Hi-Deok Lee

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引用次数: 0

Abstract

Two-dimensional transition metal dichalcogenide (TMDC) materials have unique structural and chemical properties, which makes them suitable for next-generation devices. However, high contact resistance between TMDCs and metal contacts limits the device performance. Metallic 1 T phase at the interface facilitates charge injection and reduce the contact resistance. This study reports on a low-frequency Ar/O₂ plasma technique for achieving a uniform and clean 2H → 1 T phase transition in MoS₂, confirmed through Raman, PL, TEM and XPS measurements. Furthermore, this study demonstrates that oxygen-based treatment can form MoO bonds and create a uniform surface, thereby passivating the defects present on the MoS₂ surface, as analyzed by XPS and AFM. This research opens up new possibilities for phase transition techniques, suggesting that they can enhance the contact properties between MoS₂ and metals, thereby improving device characteristics.

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Ar/O2等离子体处理二硫化钼的相工程

二维过渡金属二硫化物（TMDC）材料具有独特的结构和化学性质，使其适用于下一代器件。然而，TMDCs和金属触点之间的高接触电阻限制了器件的性能。界面处的金属1t相有利于电荷注入，降低了接触电阻。本研究报道了一种低频Ar/O2等离子体技术，该技术实现了MoS2中均匀清洁的2H→1t相变，并通过拉曼、PL、TEM和XPS测量得到了证实。此外，通过XPS和AFM分析，本研究表明，氧基处理可以形成MoO键并形成均匀的表面，从而钝化MoS2表面上存在的缺陷。这项研究为相变技术开辟了新的可能性，表明它们可以增强MoS2和金属之间的接触特性，从而改善器件特性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Materials Letters 工程技术-材料科学：综合

CiteScore

5.60

自引率

3.30%

发文量

1948

审稿时长

50 days

期刊介绍： Materials Letters has an open access mirror journal Materials Letters: X, sharing the same aims and scope, editorial team, submission system and rigorous peer review. Materials Letters is dedicated to publishing novel, cutting edge reports of broad interest to the materials community. The journal provides a forum for materials scientists and engineers, physicists, and chemists to rapidly communicate on the most important topics in the field of materials. Contributions include, but are not limited to, a variety of topics such as: • Materials - Metals and alloys, amorphous solids, ceramics, composites, polymers, semiconductors • Applications - Structural, opto-electronic, magnetic, medical, MEMS, sensors, smart • Characterization - Analytical, microscopy, scanning probes, nanoscopic, optical, electrical, magnetic, acoustic, spectroscopic, diffraction • Novel Materials - Micro and nanostructures (nanowires, nanotubes, nanoparticles), nanocomposites, thin films, superlattices, quantum dots. • Processing - Crystal growth, thin film processing, sol-gel processing, mechanical processing, assembly, nanocrystalline processing. • Properties - Mechanical, magnetic, optical, electrical, ferroelectric, thermal, interfacial, transport, thermodynamic • Synthesis - Quenching, solid state, solidification, solution synthesis, vapor deposition, high pressure, explosive