A low-magnetic-field laser emitter module with dual-layer microcoil for chip-scale atomic magnetometer applications

IF 5.1 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical Pub Date : 2026-04-01 Epub Date: 2026-01-30 DOI:10.1016/j.sna.2026.117544

Jianwei Hou , Yanbin Wang , Fengming Ye , Jiaxiang Wang , Mengqiu Li , Mingzhi Yu , Faheng Zang , Dezhao Li , Xiaojun Guo , Zhuoqing Yang

{"title":"A low-magnetic-field laser emitter module with dual-layer microcoil for chip-scale atomic magnetometer applications","authors":"Jianwei Hou , Yanbin Wang , Fengming Ye , Jiaxiang Wang , Mengqiu Li , Mingzhi Yu , Faheng Zang , Dezhao Li , Xiaojun Guo , Zhuoqing Yang","doi":"10.1016/j.sna.2026.117544","DOIUrl":null,"url":null,"abstract":"<div><div>Chip-scale atomic magnetometers (CSAMs) facilitate high-precision measurements of ultra-weak magnetic fields, which are increasingly vital for portable applications, biomedical sensing, including magnetoencephalography (MEG) and magnetocardiography (MCG) and resource exploration. As a pivotal component, the laser source provides the specific wavelengths required to induce spin polarization in alkali metal atoms within the vapor cell. However, conventional Vertical-Cavity Surface-Emitting Lasers (VCSELs) are often limited by the stringent requirements for miniaturization and low magnetic interference in atomic magnetometers, primarily due to the induced magnetic fields generated by the integrated temperature-controlled coil. To address these challenges, this paper presents a laser emitter with Magnetic-field-suppressed Coils (LEMC). By configuring opposing current directions in adjacent windings, the magnetic fields generated by the energized wires are locally attenuated, achieving a significant suppression of the macroscopic induced magnetic field. Simulations of various current direction layouts demonstrate the superiority of the double-layer coil configuration in reducing magnetic interference. A silicon substrate with a deposited Si<sub>3</sub>N<sub>4</sub> thin film serves as the thermal interface layer to ensure a precise temperature response. Experimental results demonstrate a residual magnetic field sensitivity of 0.49 nT/mA at a distance of 2 mm from the coil surface, while maintaining a temperature control stability of ±0.005°C at 80°C. The experiments also validated the stable temperature regulation of the coil and the wavelength tunability of the VCSEL. The proposed design represents a viable approach for applications in atomic sensors based on quantum mechanics principles.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"400 ","pages":"Article 117544"},"PeriodicalIF":5.1000,"publicationDate":"2026-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Sensors and Actuators A-physical","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0924424726000956","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"2026/1/30 0:00:00","PubModel":"Epub","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}

引用次数: 0

Abstract

Chip-scale atomic magnetometers (CSAMs) facilitate high-precision measurements of ultra-weak magnetic fields, which are increasingly vital for portable applications, biomedical sensing, including magnetoencephalography (MEG) and magnetocardiography (MCG) and resource exploration. As a pivotal component, the laser source provides the specific wavelengths required to induce spin polarization in alkali metal atoms within the vapor cell. However, conventional Vertical-Cavity Surface-Emitting Lasers (VCSELs) are often limited by the stringent requirements for miniaturization and low magnetic interference in atomic magnetometers, primarily due to the induced magnetic fields generated by the integrated temperature-controlled coil. To address these challenges, this paper presents a laser emitter with Magnetic-field-suppressed Coils (LEMC). By configuring opposing current directions in adjacent windings, the magnetic fields generated by the energized wires are locally attenuated, achieving a significant suppression of the macroscopic induced magnetic field. Simulations of various current direction layouts demonstrate the superiority of the double-layer coil configuration in reducing magnetic interference. A silicon substrate with a deposited Si₃N₄ thin film serves as the thermal interface layer to ensure a precise temperature response. Experimental results demonstrate a residual magnetic field sensitivity of 0.49 nT/mA at a distance of 2 mm from the coil surface, while maintaining a temperature control stability of ±0.005°C at 80°C. The experiments also validated the stable temperature regulation of the coil and the wavelength tunability of the VCSEL. The proposed design represents a viable approach for applications in atomic sensors based on quantum mechanics principles.

查看原文本刊更多论文

一种用于芯片级原子磁强计的双层微线圈低磁场激光发射器模块

芯片级原子磁强计（CSAMs）有助于超弱磁场的高精度测量，这在便携式应用，生物医学传感，包括脑磁图（MEG）和心磁图（MCG）和资源勘探中越来越重要。作为一个关键的组件，激光源提供了特定的波长，以诱导碱金属原子的自旋极化在蒸汽电池内。然而，传统的垂直腔表面发射激光器（VCSELs）往往受到原子磁强计小型化和低磁干扰的严格要求的限制，主要是由于集成温控线圈产生的感应磁场。为了解决这些问题，本文提出了一种具有磁场抑制线圈（LEMC）的激光发射器。通过在相邻绕组中配置相反的电流方向，通电导线产生的磁场被局部衰减，从而实现对宏观感应磁场的显著抑制。各种电流方向布局的仿真结果表明了双层线圈结构在减小磁干扰方面的优越性。硅衬底与沉积的Si3N4薄膜作为热界面层，以确保精确的温度响应。实验结果表明，在距离线圈表面2 mm处，残余磁场灵敏度为0.49 nT/mA，同时在80°C时保持±0.005°C的温度控制稳定性。实验还验证了线圈的稳定温度调节和VCSEL的波长可调性。提出的设计代表了基于量子力学原理的原子传感器应用的可行方法。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

求助全文

约1分钟内获得全文求助全文

来源期刊

Sensors and Actuators A-physical 工程技术-工程：电子与电气

CiteScore

8.10

自引率

6.50%

发文量

630

审稿时长

49 days

期刊介绍： Sensors and Actuators A: Physical brings together multidisciplinary interests in one journal entirely devoted to disseminating information on all aspects of research and development of solid-state devices for transducing physical signals. Sensors and Actuators A: Physical regularly publishes original papers, letters to the Editors and from time to time invited review articles within the following device areas: • Fundamentals and Physics, such as: classification of effects, physical effects, measurement theory, modelling of sensors, measurement standards, measurement errors, units and constants, time and frequency measurement. Modeling papers should bring new modeling techniques to the field and be supported by experimental results. • Materials and their Processing, such as: piezoelectric materials, polymers, metal oxides, III-V and II-VI semiconductors, thick and thin films, optical glass fibres, amorphous, polycrystalline and monocrystalline silicon. • Optoelectronic sensors, such as: photovoltaic diodes, photoconductors, photodiodes, phototransistors, positron-sensitive photodetectors, optoisolators, photodiode arrays, charge-coupled devices, light-emitting diodes, injection lasers and liquid-crystal displays. • Mechanical sensors, such as: metallic, thin-film and semiconductor strain gauges, diffused silicon pressure sensors, silicon accelerometers, solid-state displacement transducers, piezo junction devices, piezoelectric field-effect transducers (PiFETs), tunnel-diode strain sensors, surface acoustic wave devices, silicon micromechanical switches, solid-state flow meters and electronic flow controllers. Etc...