Cathodic arc deposition of TiAlN coatings and its influence on their physical and mechanical properties, structure and phase composition

IF 0.8 4区物理与天体物理 Q4 PHYSICS, MULTIDISCIPLINARY

Russian Physics Journal Pub Date : 2026-01-12 DOI:10.1007/s11182-025-03627-5

K. N. Ramazanov, M. S. Syrtanov, Yu. G. Khusainov, V. R. Mukhamadeev, A. Yu. Nazarov, A. M. Zarifullina

引用次数: 0

Abstract

The paper deals with the TiAlN-based coating synthesis using cathodic arc deposition. The deposition process is performed on an ion plasma vacuum installation consisting of the hot cathode and the additional plasma source “PINK”. The paper studies the influence of different values of the discharge current of the “PINK” on physical and mechanical properties of the coating and its structure and phase composition.

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阴极电弧沉积TiAlN涂层及其对涂层物理力学性能、组织和相组成的影响

本文研究了用阴极电弧沉积法制备tialn基涂层。沉积过程在离子等离子体真空装置上进行，该装置由热阴极和附加等离子体源“PINK”组成。研究了不同放电电流值对“PINK”涂层物理力学性能及其组织和相组成的影响。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Russian Physics Journal PHYSICS, MULTIDISCIPLINARY-

CiteScore

1.00

自引率

50.00%

发文量

208

审稿时长

3-6 weeks

期刊介绍： Russian Physics Journal covers the broad spectrum of specialized research in applied physics, with emphasis on work with practical applications in solid-state physics, optics, and magnetism. Particularly interesting results are reported in connection with: electroluminescence and crystal phospors; semiconductors; phase transformations in solids; superconductivity; properties of thin films; and magnetomechanical phenomena.