A study of flatness digital measuring instrument models for algorithmic validation of minimum zone method

IF 3.7 2区 工程技术 Q2 ENGINEERING, MANUFACTURING
Keying Yang, Hang Yu, Ming Kong, Jing Yu
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引用次数: 0

Abstract

To address the current lack of standardized evaluation systems and complete metrological traceability chains for flatness assessment algorithms, this study proposes a flatness digital measuring instrument model based on the minimum zone (MZ) method. By combining triangle and cross criteria, along with point cloud geometric feature analysis, barycentric coordinate methods, and projection techniques, a constraint framework satisfying the four fundamental sampling points is established. Based on rigorous mathematical and geometric derivations, a unified standard for constructing the flatness digital measuring instrument model is developed, and sampling procedures as well as reference model examples under different criteria are provided. Utilizing this model set and its implementation methodology, a series of validation experiments were conducted to assess the feasibility and applicability of various flatness evaluation algorithms and measurement software. Experimental results demonstrate that the proposed model is effective for verifying and evaluating flatness assessment algorithms, supporting accuracy validation down to 0.1 μm. This research provides a reproducible and traceable technical pathway for the standardized verification of flatness algorithms, supporting quality control in ultra-precision manufacturing.
最小区法算法验证的平面度数字测量仪模型研究
针对目前平面度评估算法缺乏标准化的评估体系和完整的计量溯源链的问题,本研究提出了一种基于最小区域(MZ)方法的平面度数字测量仪模型。结合三角准则和交叉准则,结合点云几何特征分析、质心坐标法和投影技术,建立了满足四个基本采样点的约束框架。在严格的数学和几何推导的基础上,建立了平面度数字测量仪模型的统一标准,并给出了不同标准下的采样步骤和参考模型实例。利用该模型集及其实现方法,进行了一系列验证实验,以评估各种板形评价算法和测量软件的可行性和适用性。实验结果表明,该模型能够有效地验证和评估平面度评估算法,支持精度低至0.1 μm的验证。该研究为平面度算法的标准化验证提供了可重复和可追溯的技术途径,为超精密制造中的质量控制提供了支持。
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来源期刊
CiteScore
7.40
自引率
5.60%
发文量
177
审稿时长
46 days
期刊介绍: Precision Engineering - Journal of the International Societies for Precision Engineering and Nanotechnology is devoted to the multidisciplinary study and practice of high accuracy engineering, metrology, and manufacturing. The journal takes an integrated approach to all subjects related to research, design, manufacture, performance validation, and application of high precision machines, instruments, and components, including fundamental and applied research and development in manufacturing processes, fabrication technology, and advanced measurement science. The scope includes precision-engineered systems and supporting metrology over the full range of length scales, from atom-based nanotechnology and advanced lithographic technology to large-scale systems, including optical and radio telescopes and macrometrology.
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