Large-Area Hydrogenated Amorphous Silicon Schottky Photosensor Arrays for Display Integration

Abstract

In this work, a system for the real-time spatially resolved detection of visible light on a large area is realized on glass. Schottky photodiodes, consisting of hydrogenated amorphous silicon (a-Si:H) and molybdenum–tantalum (MoTa), are employed as detectors. The detectors exhibit an internal quantum efficiency of up to 70.96% and a response time smaller than 20 μs. The noise equivalent power was measured at 2.424e-10 W/√Hz. Process compatibility with commonly employed amorphous indium gallium zinc oxide (a-IGZO) and a-Si:H thin-film transistors (TFT) is shown. The driving and real-time readout of a photosensor array is demonstrated using a microcontroller and a current-input ADC.