Precision tracking of an XY micro-positioning stage using a generalized asymmetric Bouc-Wen model and error-based ADRC

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical Pub Date : 2025-10-20 DOI:10.1016/j.sna.2025.117191

Linkang Wang , Zhicheng Song , Bai Chen , Hongtao Wu

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引用次数: 0

Abstract

piezo-actuated micro-positioning stages (MPSs) are essential devices for micro/nano-scale operations. The linear control of the MPS directly influences the efficiency and accuracy of the positioning process. However, inherent hysteresis in piezoelectric actuators (PEAs) and unforeseen external disturbances significantly hinder system performance. To this end, this paper proposes a new composite feedforward/feedback controller. Firstly, a generalized asymmetric Bouc-Wen (GABW) model is proposed to characterize the asymmetric and rate-dependent hysteresis nonlinearity while accounting for the influence of system inertia. Secondly, an error-based active disturbance rejection control (ADRC) strategy is proposed to rapidly and accurately estimate and compensate for external disturbances. Then, a composite control method combining the GABW model and error-based ADRC is proposed. The stability of the proposed method is analyzed, and the feasible domain of the control parameters is investigated. Finally, the effectiveness and superiority of the proposed controller are demonstrated through simulation studies and prototype experiments. Experimental results show that the proposed method combines the advantages of PID and classic ADRC, demonstrating its effectiveness and superiority.

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基于广义非对称Bouc-Wen模型和误差自抗扰控制器的XY微定位平台精确跟踪

压电驱动微定位平台是微/纳米尺度操作的重要设备。MPS的线性控制直接影响到定位过程的效率和精度。然而，压电致动器的固有滞后和不可预见的外部干扰严重影响了系统的性能。为此，本文提出了一种新的复合前馈/反馈控制器。首先，在考虑系统惯性影响的情况下，提出了广义非对称Bouc-Wen （GABW）模型来表征非对称和速率相关的滞后非线性；其次，提出了一种基于误差的自抗扰控制策略，以快速准确地估计和补偿外部干扰。然后，提出了GABW模型与基于误差的自抗扰控制器相结合的复合控制方法。分析了所提方法的稳定性，研究了控制参数的可行域。最后，通过仿真研究和样机实验验证了所提控制器的有效性和优越性。实验结果表明，该方法结合了PID和经典自抗扰控制器的优点，证明了其有效性和优越性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Sensors and Actuators A-physical 工程技术-工程：电子与电气

CiteScore

8.10

自引率

6.50%

发文量

630

审稿时长

49 days

期刊介绍： Sensors and Actuators A: Physical brings together multidisciplinary interests in one journal entirely devoted to disseminating information on all aspects of research and development of solid-state devices for transducing physical signals. Sensors and Actuators A: Physical regularly publishes original papers, letters to the Editors and from time to time invited review articles within the following device areas: • Fundamentals and Physics, such as: classification of effects, physical effects, measurement theory, modelling of sensors, measurement standards, measurement errors, units and constants, time and frequency measurement. Modeling papers should bring new modeling techniques to the field and be supported by experimental results. • Materials and their Processing, such as: piezoelectric materials, polymers, metal oxides, III-V and II-VI semiconductors, thick and thin films, optical glass fibres, amorphous, polycrystalline and monocrystalline silicon. • Optoelectronic sensors, such as: photovoltaic diodes, photoconductors, photodiodes, phototransistors, positron-sensitive photodetectors, optoisolators, photodiode arrays, charge-coupled devices, light-emitting diodes, injection lasers and liquid-crystal displays. • Mechanical sensors, such as: metallic, thin-film and semiconductor strain gauges, diffused silicon pressure sensors, silicon accelerometers, solid-state displacement transducers, piezo junction devices, piezoelectric field-effect transducers (PiFETs), tunnel-diode strain sensors, surface acoustic wave devices, silicon micromechanical switches, solid-state flow meters and electronic flow controllers. Etc...