Investigation of radio-frequency sheath structure in electronegative plasma with Cairns–Tsallis electron distribution

IF 1.5 4区物理与天体物理 Q3 OPTICS

The European Physical Journal D Pub Date : 2025-10-18 DOI:10.1140/epjd/s10053-025-01076-w

Mohamed Bouzraa, Abdelhak Missaoui, Morad El Kaouini, Mohamed El Bojaddaini, Hassan Chatei

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Abstract

This study investigates the behavior of a radio-frequency (RF) plasma sheath comprising electrons, positive ions, and negative ions. The sheath structure is analyzed numerically using a one-dimensional hydrodynamic model coupled to an equivalent circuit. In this model, electrons are described by a Cairns–Tsallis distribution, which accounts for both non-extensive and non-thermal characteristics. Positive ions are modeled as a fluid, while negative ions follow a Boltzmann distribution. An equivalent circuit, consisting of a diode, a capacitor, and a current source connected in parallel, is used to describe the spatio-temporal evolution of the RF sheath properties. The results show that as the electronegativity parameter decreases, the sheath structure becomes significantly influenced by the non-extensivity parameter, the non-thermality parameter, the current amplitude, the electron to negative ion temperature ratio, and the current frequency.

Graphical abstract

Abstract Image

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电负性等离子体射频鞘层结构的Cairns-Tsallis电子分布研究

本研究探讨了由电子、正离子和负离子组成的射频等离子体鞘层的行为。采用一维流体力学模型耦合等效电路对护套结构进行了数值分析。在这个模型中，电子是用凯恩斯-萨利斯分布来描述的，它既说明了非扩展特性，也说明了非热特性。正离子被建模为流体，而负离子遵循玻尔兹曼分布。一个等效电路，由一个二极管，一个电容器和一个并联的电流源组成，用来描述射频护套特性的时空演变。结果表明：随着电负性参数的减小，鞘层结构受非扩张性参数、非热性参数、电流幅值、电子与负离子温度比和电流频率的影响显著；图形抽象

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来源期刊

The European Physical Journal D 物理-物理：原子、分子和化学物理

CiteScore

3.10

自引率

11.10%

发文量

213

审稿时长

3 months

期刊介绍： The European Physical Journal D (EPJ D) presents new and original research results in: Atomic Physics; Molecular Physics and Chemical Physics; Atomic and Molecular Collisions; Clusters and Nanostructures; Plasma Physics; Laser Cooling and Quantum Gas; Nonlinear Dynamics; Optical Physics; Quantum Optics and Quantum Information; Ultraintense and Ultrashort Laser Fields. The range of topics covered in these areas is extensive, from Molecular Interaction and Reactivity to Spectroscopy and Thermodynamics of Clusters, from Atomic Optics to Bose-Einstein Condensation to Femtochemistry.