M. Rahmani , N. Akhlaghipour , J. Taghinejad , A.R. Niknam
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引用次数: 0
Abstract
The spatiotemporal evolution of plasma sheaths in low-pressure RF discharges is studied using particle-in-cell (PIC) simulations in conjunction with analytical calculations. The effects of RF voltage frequency, amplitude, and initial plasma density on sheath width, ion current density, and particle distributions are analyzed at multiple spatial locations over time. The results indicate that higher RF frequencies significantly enhance the ion current density due to increased space charge effects. Additionally, spatial mapping of peak ion current density demonstrates a strong dependence on RF voltage parameters. The temporal behavior of the ion current at both grounded and powered electrodes is characterized.
期刊介绍:
The Journal of Electrostatics is the leading forum for publishing research findings that advance knowledge in the field of electrostatics. We invite submissions in the following areas:
Electrostatic charge separation processes.
Electrostatic manipulation of particles, droplets, and biological cells.
Electrostatically driven or controlled fluid flow.
Electrostatics in the gas phase.