Luminescence signature of deep level defects evaluation in N+ implanted semi-insulating 6H- SiC

IF 2.7 4区材料科学 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY

Materials Letters Pub Date : 2025-10-04 DOI:10.1016/j.matlet.2025.139616

K. Kamalakkannan , R. Rajaraman , K. Sivaji , Mukesh Ranjan

引用次数: 0

Abstract

Photoluminescence spectroscopy investigation was conducted on semi-insulating 6H-Silicon Carbide subjected to nitrogen ion implantation at fluences of 10¹⁵ and 10¹⁶ N⁺/cm² with 130 keV energy, followed by annealing at 800 °C to study recrystallization effects. Deformations related to deep levels variation with implantation and defect recovery were investigated from intrinsic luminescence peaks. Annealing triggers asymmetrical to symmetrical sharp luminescence peaks and regaining the active radiative centers at ∼555 nm and ∼561 nm. The perceptible change in quantification of disorder 1-A_norm, with annealing revealed the partial recovery of the high fluence samples indicating the defects accumulations.

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N+注入半绝缘6H- SiC深层缺陷评价的发光特征

在13kev能量下，以1015和1016 N+/cm2注入氮离子，对半绝缘6h -碳化硅进行了光致发光光谱研究，并在800℃下退火，研究了再结晶效果。从本征发光峰出发，研究了与植入和缺陷恢复相关的深能级变化。退火触发不对称到对称的尖锐发光峰，并在~ 555 nm和~ 561 nm处恢复活性辐射中心。在退火过程中，无序1-Anorm的定量变化表明，高通量样品的部分恢复表明缺陷的积累。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Materials Letters 工程技术-材料科学：综合

CiteScore

5.60

自引率

3.30%

发文量

1948

审稿时长

50 days

期刊介绍： Materials Letters has an open access mirror journal Materials Letters: X, sharing the same aims and scope, editorial team, submission system and rigorous peer review. Materials Letters is dedicated to publishing novel, cutting edge reports of broad interest to the materials community. The journal provides a forum for materials scientists and engineers, physicists, and chemists to rapidly communicate on the most important topics in the field of materials. Contributions include, but are not limited to, a variety of topics such as: • Materials - Metals and alloys, amorphous solids, ceramics, composites, polymers, semiconductors • Applications - Structural, opto-electronic, magnetic, medical, MEMS, sensors, smart • Characterization - Analytical, microscopy, scanning probes, nanoscopic, optical, electrical, magnetic, acoustic, spectroscopic, diffraction • Novel Materials - Micro and nanostructures (nanowires, nanotubes, nanoparticles), nanocomposites, thin films, superlattices, quantum dots. • Processing - Crystal growth, thin film processing, sol-gel processing, mechanical processing, assembly, nanocrystalline processing. • Properties - Mechanical, magnetic, optical, electrical, ferroelectric, thermal, interfacial, transport, thermodynamic • Synthesis - Quenching, solid state, solidification, solution synthesis, vapor deposition, high pressure, explosive