Optimization of MEMS Sensors with 2D Materials: Graphene-Induced Nonradiative Transitions and Suspended Proof Mass Structures.

Abstract

Force and acceleration sensors based on graphene-induced nonradiative transitions and silicon proof mass structures, supported by various two-dimensional material cantilevers, are investigated. The results show that hexagonal boron nitride, due to its low Young's modulus and ultrathin thickness, offers superior deformability, thereby enhancing the performance of the microelectromechanical systems (MEMS) sensor. Additionally, the extreme sensitivity of graphene-induced nonradiative transitions to distance allows the sensor to maintain high performance while minimizing its overall dimensions. In force sensing applications, the device achieves a measurement range of 0-400 pN with a sensitivity of 0.50 %/pN. For acceleration sensing, it exhibits a measurement range of 0-6 g, with an accelerometer sensitivity of 17.24 %/g. This work not only demonstrates the feasibility of integrating two-dimensional materials with MEMS, but also establishes a technical foundation for the development of multifunctional MEMS sensors designed for the Internet of Things and implantable medical devices.