Review of n-type doping diamond: methods, elements, and properties

IF 5.8 3区材料科学 Q2 CHEMISTRY, MULTIDISCIPLINARY

Carbon Letters Pub Date : 2025-08-30 DOI:10.1007/s42823-025-00970-y

Mingke Li, Dayang Yu, Shengnan Shen, Xin Liu

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引用次数: 0

Abstract

Doping diamond exhibits excellent photoelectric properties, making it promising for applications in wide-bandgap semiconductors, high-temperature devices, and high-power electronics. However, research on n-type doping remains limited. This paper reviews the main n-type doping methods for diamond: ion implantation (I/I), chemical vapor deposition (CVD), high pressure–high temperature (HPHT), deuterated method (DM), surface charge transfer doping (SCTD), and laser irradiation (LI). It analyzes the parameters, advantages, and disadvantages of each technique while classifying common single-element and multi-element co-doping methods. Single-element dopants include Group IA (Li, Na, K), Group ⅡA (Be, Mg), Group VA (N, P, As, Sb), and Group ⅥA (O, S, Se, Te) elements. Multi-element co-doping often combines B-P, B-S, B-O, and B-N pairs. Additionally, we examine the atomic structures of these dopants, introduce commonly used simulation models, and compare the electronic characteristics of synthesized n-type doping diamonds. Finally, we summarize the challenges of n-type doping diamond in doping equipment, processes, and electronic devices, and propose possible improvements and future development directions.

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n型掺杂金刚石的研究进展：方法、元素和性质

掺杂金刚石具有优异的光电性能，在宽禁带半导体、高温器件和大功率电子器件等领域具有广阔的应用前景。然而，对n型掺杂的研究仍然有限。本文综述了金刚石n型掺杂的主要方法：离子注入（I/I）、化学气相沉积（CVD）、高压高温（HPHT）、氘化法（DM）、表面电荷转移掺杂（SCTD）和激光辐照（LI）。在对常用的单元素和多元素共掺杂方法进行分类的同时，分析了每种技术的参数、优缺点。单元素掺杂剂包括IA族（Li、Na、K）、ⅡA族（Be、Mg）、VA族（N、P、As、Sb）和ⅥA族（O、S、Se、Te）元素。多元素共掺杂通常结合B-P、B-S、B-O和B-N对。此外，我们研究了这些掺杂剂的原子结构，介绍了常用的模拟模型，并比较了合成的n型掺杂金刚石的电子特性。最后总结了n型掺杂金刚石在掺杂设备、工艺、电子器件等方面面临的挑战，并提出了可能的改进和未来的发展方向。

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来源期刊

Carbon Letters CHEMISTRY, MULTIDISCIPLINARY-MATERIALS SCIENCE, MULTIDISCIPLINARY

CiteScore

7.30

自引率

20.00%

发文量

118

期刊介绍： Carbon Letters aims to be a comprehensive journal with complete coverage of carbon materials and carbon-rich molecules. These materials range from, but are not limited to, diamond and graphite through chars, semicokes, mesophase substances, carbon fibers, carbon nanotubes, graphenes, carbon blacks, activated carbons, pyrolytic carbons, glass-like carbons, etc. Papers on the secondary production of new carbon and composite materials from the above mentioned various carbons are within the scope of the journal. Papers on organic substances, including coals, will be considered only if the research has close relation to the resulting carbon materials. Carbon Letters also seeks to keep abreast of new developments in their specialist fields and to unite in finding alternative energy solutions to current issues such as the greenhouse effect and the depletion of the ozone layer. The renewable energy basics, energy storage and conversion, solar energy, wind energy, water energy, nuclear energy, biomass energy, hydrogen production technology, and other clean energy technologies are also within the scope of the journal. Carbon Letters invites original reports of fundamental research in all branches of the theory and practice of carbon science and technology.