High-sensitivity surface acoustic wave magnetic field sensors enabled by amorphous Fe-Ga-B films with optimized boron content

IF 3.6 2区物理与天体物理 Q2 PHYSICS, APPLIED

Applied Physics Letters Pub Date : 2025-10-06 DOI:10.1063/5.0287101

Chenye Zhang, Shiyan Ma, Kailin Li, Chiyuan Wang, Guanying Wang, Yang Lu, Xianfeng Liang, Tianxiang Nan

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引用次数: 0

Abstract

Magnetic field sensors based on acoustic resonators and the ΔE effect in ferromagnetic thin films enable compact size, high sensitivity, wide bandwidth, chip-scale field detection. The sensing performance of the device strongly depends on the soft magnetic and magnetostrictive properties of ferromagnetic films. Here, we systematically investigate the relationship between the magnetic field response of ΔE effect-based delay line surface acoustic wave (SAW) devices and the boron (B) doping concentration in Fe-Ga-B magnetostrictive thin films. Structural characterizations reveal a transition from a polycrystalline to a fully amorphous phase at a B content of 9.69 at. %, accompanied by a sharp reduction in both coercivity and in-plane anisotropy field. This transition leads to a step-like improvement in sensor performance. By optimizing the B composition, we identify a doping range that significantly enhances the performance of SAW devices, with a maximum phase shift of 60.81° at a B content of 12.33 at. % and a peak phase sensitivity of 5.95°/Oe at a B content of 18.84 at. %, providing a magnetic material design guideline for advancing magnetoelectric acoustic devices.

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利用优化硼含量的非晶Fe-Ga-B薄膜实现高灵敏度表面声波磁场传感器

基于声谐振器和ΔE效应的磁场传感器在铁磁薄膜中实现了紧凑的尺寸，高灵敏度，宽带宽，芯片级的场检测。器件的传感性能在很大程度上取决于铁磁薄膜的软磁和磁致伸缩性能。本文系统地研究了基于ΔE效应的延迟线表面声波（SAW）器件的磁场响应与Fe-Ga-B磁致伸缩薄膜中硼(B)掺杂浓度的关系。结构表征表明，当B含量为9.69 at时，从多晶过渡到完全非晶相。%，伴随着矫顽力和面内各向异性场的急剧减小。这种转变导致传感器性能的阶梯式改进。通过优化B的组成，我们确定了一个显著提高SAW器件性能的掺杂范围，当B含量为12.33 at时，最大相移为60.81°。在B含量为18.84 at时，峰值相灵敏度为5.95°/Oe。，为磁电声器件的发展提供了磁性材料设计指南。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Applied Physics Letters 物理-物理：应用

CiteScore

6.40

自引率

10.00%

发文量

1821

审稿时长

1.6 months

期刊介绍： Applied Physics Letters (APL) features concise, up-to-date reports on significant new findings in applied physics. Emphasizing rapid dissemination of key data and new physical insights, APL offers prompt publication of new experimental and theoretical papers reporting applications of physics phenomena to all branches of science, engineering, and modern technology. In addition to regular articles, the journal also publishes invited Fast Track, Perspectives, and in-depth Editorials which report on cutting-edge areas in applied physics. APL Perspectives are forward-looking invited letters which highlight recent developments or discoveries. Emphasis is placed on very recent developments, potentially disruptive technologies, open questions and possible solutions. They also include a mini-roadmap detailing where the community should direct efforts in order for the phenomena to be viable for application and the challenges associated with meeting that performance threshold. Perspectives are characterized by personal viewpoints and opinions of recognized experts in the field. Fast Track articles are invited original research articles that report results that are particularly novel and important or provide a significant advancement in an emerging field. Because of the urgency and scientific importance of the work, the peer review process is accelerated. If, during the review process, it becomes apparent that the paper does not meet the Fast Track criterion, it is returned to a normal track.