Monolithic integrated β -Ga2O3 inverters using charge trapping technique

IF 3.6 2区物理与天体物理 Q2 PHYSICS, APPLIED

Applied Physics Letters Pub Date : 2025-10-06 DOI:10.1063/5.0287286

MuJun Li, MingHao He, XiaoHui Wang, Yang Jiang, HaoZhe Yu, ChenKai Deng, Kah-Wee Ang, Qing Wang, HongYu Yu

引用次数: 0

Abstract

In this work, high-performance monolithic integrated β-Ga2O3 inverters are proposed, in which the enhancement mode (E-mode) devices are implemented using a charge trapping layer (CTL) technique. Leveraging the threshold voltage tunability of the CTL-based E-mode devices, the inverters demonstrate robust operation across a wide range (5–18 V) of supply voltage (VDD). In addition, the inverter with a β value of 40 achieves an ultralow output low voltage (VOL = 0.01 V) at VDD of 18 V, as well as excellent output swing/VDD ratio (17.99 V/18 V), noise margin capability (NML/NMH = 7.65 V/7.55 V), maximum voltage gain (9.6 V/V), and maximum power consumption (3.7 × 10−4 W). Furthermore, dynamic testing was further conducted to investigate the relationship between the dimensional matching of E/D-mode devices and key parameters such as transmission delay and output characteristics. These findings provide insights into the fabrication of monolithic integrated β-Ga2O3 inverters.

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利用电荷俘获技术的单片集成β -Ga2O3逆变器

在这项工作中，提出了高性能单片集成β-Ga2O3逆变器，其中增强模式（e模式）器件使用电荷捕获层（CTL）技术实现。利用基于ctl的e模式器件的阈值电压可调性，逆变器在宽范围（5-18 V）的电源电压（VDD）内表现出稳健的运行。此外，β值为40的逆变器在VDD为18 V时实现了超低输出低电压（VOL = 0.01 V），以及出色的输出摆幅/VDD比（17.99 V/18 V），噪声裕度能力（NML/NMH = 7.65 V/7.55 V），最大电压增益（9.6 V/V）和最大功耗（3.7 × 10−4 W）。进一步进行了动态测试，研究了E/ d模式器件尺寸匹配与传输时延、输出特性等关键参数之间的关系。这些发现为单片集成β-Ga2O3逆变器的制造提供了见解。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Applied Physics Letters 物理-物理：应用

CiteScore

6.40

自引率

10.00%

发文量

1821

审稿时长

1.6 months

期刊介绍： Applied Physics Letters (APL) features concise, up-to-date reports on significant new findings in applied physics. Emphasizing rapid dissemination of key data and new physical insights, APL offers prompt publication of new experimental and theoretical papers reporting applications of physics phenomena to all branches of science, engineering, and modern technology. In addition to regular articles, the journal also publishes invited Fast Track, Perspectives, and in-depth Editorials which report on cutting-edge areas in applied physics. APL Perspectives are forward-looking invited letters which highlight recent developments or discoveries. Emphasis is placed on very recent developments, potentially disruptive technologies, open questions and possible solutions. They also include a mini-roadmap detailing where the community should direct efforts in order for the phenomena to be viable for application and the challenges associated with meeting that performance threshold. Perspectives are characterized by personal viewpoints and opinions of recognized experts in the field. Fast Track articles are invited original research articles that report results that are particularly novel and important or provide a significant advancement in an emerging field. Because of the urgency and scientific importance of the work, the peer review process is accelerated. If, during the review process, it becomes apparent that the paper does not meet the Fast Track criterion, it is returned to a normal track.