Effects of NbN superconducting electrodes on the cryogenic characteristics of lamb wave mode AlScN piezoelectric MEMS resonators

IF 4.9 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical Pub Date : 2025-09-23 DOI:10.1016/j.sna.2025.117089

Wenzhen Li , Xuankai Xu , Jiawei Li , Peng Dong , Yiyao Zhu , Jun Li , Xufeng Kou , Tao Wu

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引用次数: 0

Abstract

In this work, we propose a S₀ mode Lamb wave resonator (LWR) on the Al_0.7Sc_0.3N platform, utilizing niobium nitride (NbN) as a superconducting electrode to replace traditional metal electrodes. Using the zero-resistivity characteristic of NbN at its critical temperature, we effectively reduce electrode loss in a cryogenic environment. Resonators with identical designs were fabricated using NbN and aluminum (Al) as electrode materials, respectively, and tested at temperatures as low as 4 K. The experimental results were fitted using a specially adapted modified Butterworth-Van Dyke (MBVD) model to analyze performance variations with temperature. Compared to the Al-based resonators, the NbN-based devices demonstrated superior cryogenic performance, achieving a quality factor (Q) of 1524, which is 7.29 times higher than at room temperature, and a figure-of-merit (FoM = Q × k_t²) of 57.89, a 5.76-fold improvement. This study highlights the advantages of NbN electrodes over Al electrodes in cryogenic environments and provides a novel design approach for acoustic resonators in qubit systems, showcasing their potential for next-generation hybrid quantum networks.

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NbN超导电极对lamb波型AlScN压电MEMS谐振器低温特性的影响

在这项工作中，我们提出了一种基于Al0.7Sc0.3N平台的50模兰姆波谐振器（LWR），利用氮化铌（NbN）作为超导电极来取代传统的金属电极。利用NbN在其临界温度下的零电阻率特性，我们有效地减少了低温环境下的电极损耗。用NbN和铝（Al）作为电极材料分别制作了相同设计的谐振器，并在低至4 K的温度下进行了测试。采用一种特殊的改进Butterworth-Van Dyke （MBVD）模型对实验结果进行拟合，以分析性能随温度的变化。与基于al的谐振器相比，基于nbn的器件表现出优异的低温性能，其质量因子(Q)为1524，是室温下的7.29倍，品质系数（FoM = Q × kt2）为57.89，是室温下的5.76倍。本研究强调了低温环境下NbN电极相对于Al电极的优势，并为量子比特系统中的声学谐振器提供了一种新的设计方法，展示了它们在下一代混合量子网络中的潜力。

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来源期刊

Sensors and Actuators A-physical 工程技术-工程：电子与电气

CiteScore

8.10

自引率

6.50%

发文量

630

审稿时长

49 days

期刊介绍： Sensors and Actuators A: Physical brings together multidisciplinary interests in one journal entirely devoted to disseminating information on all aspects of research and development of solid-state devices for transducing physical signals. Sensors and Actuators A: Physical regularly publishes original papers, letters to the Editors and from time to time invited review articles within the following device areas: • Fundamentals and Physics, such as: classification of effects, physical effects, measurement theory, modelling of sensors, measurement standards, measurement errors, units and constants, time and frequency measurement. Modeling papers should bring new modeling techniques to the field and be supported by experimental results. • Materials and their Processing, such as: piezoelectric materials, polymers, metal oxides, III-V and II-VI semiconductors, thick and thin films, optical glass fibres, amorphous, polycrystalline and monocrystalline silicon. • Optoelectronic sensors, such as: photovoltaic diodes, photoconductors, photodiodes, phototransistors, positron-sensitive photodetectors, optoisolators, photodiode arrays, charge-coupled devices, light-emitting diodes, injection lasers and liquid-crystal displays. • Mechanical sensors, such as: metallic, thin-film and semiconductor strain gauges, diffused silicon pressure sensors, silicon accelerometers, solid-state displacement transducers, piezo junction devices, piezoelectric field-effect transducers (PiFETs), tunnel-diode strain sensors, surface acoustic wave devices, silicon micromechanical switches, solid-state flow meters and electronic flow controllers. Etc...