Recent advances in piezoelectric resonant infrared detectors

IF 3.4 3区物理与天体物理 Q2 INSTRUMENTS & INSTRUMENTATION

Infrared Physics & Technology Pub Date : 2025-09-15 DOI:10.1016/j.infrared.2025.106155

Jicong Zhao , Haiyang Hou , Yanmeng Dang , Yanjuan Ma , Longfei Li , Haiyan Sun , Zhipei Sun , Tengfei Xu

{"title":"Recent advances in piezoelectric resonant infrared detectors","authors":"Jicong Zhao , Haiyang Hou , Yanmeng Dang , Yanjuan Ma , Longfei Li , Haiyan Sun , Zhipei Sun , Tengfei Xu","doi":"10.1016/j.infrared.2025.106155","DOIUrl":null,"url":null,"abstract":"<div><div>Uncooled micro-electromechanical systems-based piezoelectric resonant infrared detectors exploit photothermal–piezoelectric coupling for highly sensitive, wavelength-selective detection. Their compact, low-power, and easily integrable design ensures stable performance in noisy environments, enabling advanced infrared sensing and processing in complex conditions. Here, we review two operating mechanisms of piezoelectric resonant infrared detectors and their state of the art results. It provides an overview of piezoelectric resonant infrared detectors fabricated using materials such as gallium nitride (GaN), zinc oxide (ZnO), and lithium niobate (LiNbO<sub>3</sub>). Subsequently, we discuss performance enhancements for aluminum nitride (AlN)-based detectors, focusing on infrared absorption, thermal resistance, detection sensitivity, and potential applications. Finally, we present potential challenges facing piezoelectric resonant infrared detectors and outline future research directions.</div></div>","PeriodicalId":13549,"journal":{"name":"Infrared Physics & Technology","volume":"152 ","pages":"Article 106155"},"PeriodicalIF":3.4000,"publicationDate":"2025-09-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Infrared Physics & Technology","FirstCategoryId":"101","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S1350449525004487","RegionNum":3,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"INSTRUMENTS & INSTRUMENTATION","Score":null,"Total":0}

引用次数: 0

Abstract

Uncooled micro-electromechanical systems-based piezoelectric resonant infrared detectors exploit photothermal–piezoelectric coupling for highly sensitive, wavelength-selective detection. Their compact, low-power, and easily integrable design ensures stable performance in noisy environments, enabling advanced infrared sensing and processing in complex conditions. Here, we review two operating mechanisms of piezoelectric resonant infrared detectors and their state of the art results. It provides an overview of piezoelectric resonant infrared detectors fabricated using materials such as gallium nitride (GaN), zinc oxide (ZnO), and lithium niobate (LiNbO₃). Subsequently, we discuss performance enhancements for aluminum nitride (AlN)-based detectors, focusing on infrared absorption, thermal resistance, detection sensitivity, and potential applications. Finally, we present potential challenges facing piezoelectric resonant infrared detectors and outline future research directions.

查看原文本刊更多论文

压电谐振红外探测器的最新进展

基于非制冷微机电系统的压电谐振红外探测器利用光热-压电耦合实现高灵敏度、波长选择性检测。其紧凑、低功耗和易于集成的设计确保了在嘈杂环境中的稳定性能，在复杂条件下实现了先进的红外传感和处理。本文综述了压电谐振红外探测器的两种工作机理及其最新研究成果。它概述了使用氮化镓（GaN），氧化锌（ZnO）和铌酸锂（LiNbO3）等材料制造的压电谐振红外探测器。随后，我们讨论了氮化铝（AlN）探测器的性能增强，重点是红外吸收，热阻，探测灵敏度和潜在的应用。最后，我们提出了压电谐振红外探测器面临的潜在挑战，并概述了未来的研究方向。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

求助全文

约1分钟内获得全文求助全文

来源期刊

Infrared Physics & Technology 物理-光学

CiteScore

5.70

自引率

12.10%

发文量

400

审稿时长

67 days

期刊介绍： The Journal covers the entire field of infrared physics and technology: theory, experiment, application, devices and instrumentation. Infrared'' is defined as covering the near, mid and far infrared (terahertz) regions from 0.75um (750nm) to 1mm (300GHz.) Submissions in the 300GHz to 100GHz region may be accepted at the editors discretion if their content is relevant to shorter wavelengths. Submissions must be primarily concerned with and directly relevant to this spectral region. Its core topics can be summarized as the generation, propagation and detection, of infrared radiation; the associated optics, materials and devices; and its use in all fields of science, industry, engineering and medicine. Infrared techniques occur in many different fields, notably spectroscopy and interferometry; material characterization and processing; atmospheric physics, astronomy and space research. Scientific aspects include lasers, quantum optics, quantum electronics, image processing and semiconductor physics. Some important applications are medical diagnostics and treatment, industrial inspection and environmental monitoring.