Analysis of a micromachined vibrating beam accelerometer for early earthquake warning system

IF 2.5 4区工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC

Journal of Computational Electronics Pub Date : 2025-10-04 DOI:10.1007/s10825-025-02420-4

Mrinmoy Singha, Reshmi Maity, Niladri Pratap Maity

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Abstract

This paper presents the dimensional analysis of a micromachined vibrating beam accelerometer (VBA) for early earthquake warning system. Two beam resonators with natural frequencies of 124 kHz are determined. The primary benefit of this type of device over a capacitive accelerometer is its thickness independent sensitivity. This device serves for low-g acceleration detection with minimal noise and high sensitivity. The beams are suspended between two anchors, which support all mechanical and structural operations. The anchor dimensions have a significant impact on VBA’s natural frequency. The movement of proof mass creates an axial load on the beam when there is an external acceleration. The external acceleration application results in a shift in the frequency of vibration of beam. To see the parametric analysis, several single-beam dimensions are modeled. Proposed electromechanical and analytical mechanics of vibrating beam are used to validate the finite element method (FEM) simulation results.

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用于地震早期预警系统的微机械振动梁加速度计分析

本文对用于地震预警系统的微机械振动梁加速度计进行了量纲分析。确定了两个固有频率为124千赫的光束谐振器。与电容式加速度计相比，这种类型的器件的主要优点是其与厚度无关的灵敏度。该设备用于低加速度检测，噪声最小，灵敏度高。梁悬挂在两个锚之间，支撑所有的机械和结构操作。锚点维度对VBA的固有频率有显著影响。当有外部加速度时，证明质量的运动在梁上产生轴向载荷。外加加速度作用会使梁的振动频率发生偏移。为了了解参数分析，对几个单梁尺寸进行了建模。利用所提出的振动梁机电力学和解析力学对有限元模拟结果进行了验证。

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来源期刊

Journal of Computational Electronics ENGINEERING, ELECTRICAL & ELECTRONIC-PHYSICS, APPLIED

CiteScore

4.50

自引率

4.80%

发文量

142

审稿时长

>12 weeks

期刊介绍： he Journal of Computational Electronics brings together research on all aspects of modeling and simulation of modern electronics. This includes optical, electronic, mechanical, and quantum mechanical aspects, as well as research on the underlying mathematical algorithms and computational details. The related areas of energy conversion/storage and of molecular and biological systems, in which the thrust is on the charge transport, electronic, mechanical, and optical properties, are also covered. In particular, we encourage manuscripts dealing with device simulation; with optical and optoelectronic systems and photonics; with energy storage (e.g. batteries, fuel cells) and harvesting (e.g. photovoltaic), with simulation of circuits, VLSI layout, logic and architecture (based on, for example, CMOS devices, quantum-cellular automata, QBITs, or single-electron transistors); with electromagnetic simulations (such as microwave electronics and components); or with molecular and biological systems. However, in all these cases, the submitted manuscripts should explicitly address the electronic properties of the relevant systems, materials, or devices and/or present novel contributions to the physical models, computational strategies, or numerical algorithms.