Enhanced performance of Ga₂O₃-based MSM-PD by Fabry-Pérot microcavity.

IF 3.3 2区物理与天体物理 Q2 OPTICS

Optics letters Pub Date : 2025-10-01 DOI:10.1364/OL.573765

Taoan Wang, Xiyao He, Hao Xu, Ruoting Sun, Xiangyu Xu, Kelvin Hongliang Zhang, Hao Long

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引用次数: 0

Abstract

Ga₂O₃-based metal-semiconductor-metal (MSM) solar-blind photodetectors, valued for their wide bandgap and stability, are among the most promising options. However, key metrics such as detectivity, wavelength selectivity, and response time were largely constrained by the intrinsic properties of Ga₂O₃ and were difficult to enhance through optical design due to the fixed device structure. To address this, this study introduced a distributed Bragg reflector (DBR) structure in the UVC band between the sapphire substrate and Ga₂O₃ epilayer, forming a Fabry-Pérot (FP) resonant cavity with the Ga₂O₃/air interface. The incorporation of the FP microcavity significantly enhanced the UVC photon density of states (DOS) within the Ga₂O₃ thin film while suppressing that of other wavelength bands. As a result, the selectivity ratio was improved by 29.4 times (R_251nm/R_360nm=1.6×10⁴), and the device's detectivity as well as rise/fall times were also optimized. This work provided a novel, to the best of our knowledge, design strategy for high-performing solar-blind PDs.

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fabry - p微腔法增强ga2o3基MSM-PD的性能。

基于ga2o3的金属-半导体-金属（MSM）太阳盲光电探测器，因其宽带隙和稳定性而受到重视，是最有前途的选择之一。然而，诸如探测率、波长选择性和响应时间等关键指标在很大程度上受到Ga2O3固有性质的限制，并且由于固定的器件结构，难以通过光学设计来增强。为了解决这一问题，本研究在蓝宝石衬底和Ga2O3脱膜之间的UVC波段引入了分布式Bragg反射器（DBR）结构，形成了具有Ga2O3/空气界面的fabry - p（FP）谐振腔。FP微腔的加入显著提高了Ga2O3薄膜内的UVC态光子密度（DOS），同时抑制了其他波段的光子密度。结果表明，选择性比提高了29.4倍（R251nm/R360nm=1.6×104），并优化了器件的探测率和上升/下降时间。这项工作提供了一种新颖的，据我们所知，高性能太阳盲pd的设计策略。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Optics letters 物理-光学

CiteScore

6.60

自引率

8.30%

发文量

2275

审稿时长

1.7 months

期刊介绍： The Optical Society (OSA) publishes high-quality, peer-reviewed articles in its portfolio of journals, which serve the full breadth of the optics and photonics community. Optics Letters offers rapid dissemination of new results in all areas of optics with short, original, peer-reviewed communications. Optics Letters covers the latest research in optical science, including optical measurements, optical components and devices, atmospheric optics, biomedical optics, Fourier optics, integrated optics, optical processing, optoelectronics, lasers, nonlinear optics, optical storage and holography, optical coherence, polarization, quantum electronics, ultrafast optical phenomena, photonic crystals, and fiber optics. Criteria used in determining acceptability of contributions include newsworthiness to a substantial part of the optics community and the effect of rapid publication on the research of others. This journal, published twice each month, is where readers look for the latest discoveries in optics.