Single-Layer Graphene Film-Based Microacoustic Pressure Sensing through Confinement-Enhanced Reaction Engineering

Abstract

Chemical vapor deposition (CVD) on a Cu (copper) substrate is regarded as the best approach for large-scale graphene production, but preparation of high-quality single-layer graphene films remains a challenge for the research community. To address this challenge, a graphene growth method based on confinement-enhanced reaction engineering was proposed in this study. Using Cu(100) as the catalytic substrate, a simple confinement device was introduced to reduce the gas flow rate over the substrate and regulate the carbon source concentration. Additionally, Cu foam was employed as a source of Cu vapor, providing a continuous driving force for the complete decomposition of the carbon source. This approach further enhanced the catalytic reaction between the Cu vapor and the carbon source gas, ultimately achieving the successful fabrication of a uniformly distributed graphene film with a single-layer ratio of 99.8%. Moreover, by implementing a confinement device, the additional layer growth on one side of the Cu substrate was suppressed. The graphene film grown using confinement-enhanced reaction engineering exhibited outstanding mechanical properties with a 2D Young’s modulus of 263 N/m. These findings offer insight into the industrial-scale production of high-quality single-layer graphene on Cu(100) crystal facets and also offer an alternative option for applications in microacoustic pressure sensing.