Study on the Low-Damage Material Removal Mechanism of Silicon Carbide Ceramics Under Longitudinal-Torsional Ultrasonic Grinding Conditions.

IF 3 3区 工程技术 Q2 CHEMISTRY, ANALYTICAL
Micromachines Pub Date : 2025-09-13 DOI:10.3390/mi16091048
Junli Liu, Zhenqi Ma, Yanyan Yan, Dengke Yuan, Yifan Wang
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Abstract

In order to achieve the high-performance machining of silicon carbide (SiC) ceramics, longitudinal-torsional ultrasonic vibration (LTUV) was introduced into precision machining, and a systematic investigation into the effects of various process parameters on the critical cutting depth and surface quality was conducted. This investigation was undertaken with a view to exploring the ultrasonic vibration-assisted grinding mechanism of SiC ceramics. Firstly, the kinematic model of single abrasive grain trajectory and the maximum unaltered cutting thickness during longitudinal-torsional ultrasonic vibration-assisted grinding (LTUVG) was established to explore its unique grinding characteristics. On this basis, the theoretical modeling of critical cutting depth in SiC ceramics under LTUVG conditions was developed. This was then verified through longitudinal-torsional ultrasonic scratching (LTUS) experiments, and the theoretical analysis and test results prove that compared with normal scratching, the quality of SiC grooves are significantly improved by means of LTUS. During LTUS experiments, the dynamic fracture toughness, strain rate of SiC, and high-frequency ultrasonic excitation significantly enhances SiC performance, increasing the critical cutting depth and expanding the plastic removal region, so it is easy for LTUVG to yield the better surface quality in machined SiC ceramics, which provides important scholarly support for achieving the low-damage machining of SiC ceramics.

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纵向-扭转超声磨削条件下碳化硅陶瓷低损伤材料去除机理研究。
为了实现碳化硅(SiC)陶瓷的高性能加工,将纵向-扭转超声振动(LTUV)引入精密加工中,系统研究了各种工艺参数对临界切削深度和表面质量的影响。研究了超声振动辅助磨削SiC陶瓷的机理。首先,建立了纵扭超声振动辅助磨削(LTUVG)过程中单粒磨粒轨迹和最大不变切削厚度的运动学模型,探索了其独特的磨削特性;在此基础上,建立了LTUVG条件下SiC陶瓷临界切削深度的理论模型。通过纵向-扭转超声刻划(LTUS)实验验证了这一点,理论分析和试验结果证明,与普通刻划相比,LTUS能显著提高SiC沟槽的质量。在LTUS实验中,SiC的动态断裂韧性、应变率和高频超声激励显著提高了SiC的性能,增加了临界切削深度,扩大了塑性去除区域,因此LTUVG容易在加工SiC陶瓷时获得更好的表面质量,这为实现SiC陶瓷的低损伤加工提供了重要的理论支持。
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来源期刊
Micromachines
Micromachines NANOSCIENCE & NANOTECHNOLOGY-INSTRUMENTS & INSTRUMENTATION
CiteScore
5.20
自引率
14.70%
发文量
1862
审稿时长
16.31 days
期刊介绍: Micromachines (ISSN 2072-666X) is an international, peer-reviewed open access journal which provides an advanced forum for studies related to micro-scaled machines and micromachinery. It publishes reviews, regular research papers and short communications. Our aim is to encourage scientists to publish their experimental and theoretical results in as much detail as possible. There is no restriction on the length of the papers. The full experimental details must be provided so that the results can be reproduced.
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