Zhongwang Song , Weifeng Gu , Yinxuan Ni , Guoxiang Wang
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引用次数: 0
Abstract
Sb-based single-element phase-change memory exhibits exceptional potential for next-generation phase-change memory (PCM) applications, owing to its fast phase transition capability and remarkably low resistance drift coefficient. However, it is significantly hindered by its inadequate thermal stability, making it susceptible to spontaneous crystallization at ambient temperature. This research details the production of Sb-Yb composite films utilizing magnetron sputtering techniques, along with an in-depth analysis of their crystallization processes. The Sb-based composite film exhibits high crystallization temperature (120 °C), the Growth-dominated crystallization mode (navg = 0.96), low resistance drift (0.015), and enhanced optical bandgap (0.91 eV). These advancements are attributed to a unique crystalline-amorphous nanocomposite structure, where Sb nanograins (10–20 nm) are encapsulated by an amorphous Sb-Yb phase. The amorphous Yb-Sb matrix refines grain size and suppresses excessive growth of Sb nanograins, thereby significantly enhancing the structural thermal stability. This nanocomposite architecture significantly enhances thermal stability in Sb-based PCMs while exhibiting extremely low resistance drift and maintaining the growth-type crystallization mechanism, effectively overcoming the limitations of pure Sb and traditional Ge2Sb2Te5 (GST) materials.
期刊介绍:
Vacuum is an international rapid publications journal with a focus on short communication. All papers are peer-reviewed, with the review process for short communication geared towards very fast turnaround times. The journal also published full research papers, thematic issues and selected papers from leading conferences.
A report in Vacuum should represent a major advance in an area that involves a controlled environment at pressures of one atmosphere or below.
The scope of the journal includes:
1. Vacuum; original developments in vacuum pumping and instrumentation, vacuum measurement, vacuum gas dynamics, gas-surface interactions, surface treatment for UHV applications and low outgassing, vacuum melting, sintering, and vacuum metrology. Technology and solutions for large-scale facilities (e.g., particle accelerators and fusion devices). New instrumentation ( e.g., detectors and electron microscopes).
2. Plasma science; advances in PVD, CVD, plasma-assisted CVD, ion sources, deposition processes and analysis.
3. Surface science; surface engineering, surface chemistry, surface analysis, crystal growth, ion-surface interactions and etching, nanometer-scale processing, surface modification.
4. Materials science; novel functional or structural materials. Metals, ceramics, and polymers. Experiments, simulations, and modelling for understanding structure-property relationships. Thin films and coatings. Nanostructures and ion implantation.