Investigation on indentation scaling relationships of ITO thin films considering the indenter tip rounding defect

IF 7.9 2区 材料科学 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY
Zhaoxin Wang , Lijia Li , Zongyang Zhang , Wei Ji , Ming Li , Xiangyu Zong , Cong Li , Han Wang , Jibing Wang
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Abstract

To improve the applications of indium tin oxide (ITO) films, higher measurement requirements are implemented due to the significant effects of more complicated stress states and limitations of testing conditions on the mechanical properties. In this work, the effect of the tip bluntness on indentation responses and scaling relationships for film/substrate composite systems is investigated via finite-element (FE) simulations and dimensional analysis. A novel indentation method is proposed to measure the intrinsic elastic modulus of thin films based on the scaling relationship among the curvature of the loading segment in P-h curves and material properties. FE simulations indicate the significant effect of tip bluntness on indentation responses. However, the curvature is essentially independent of the dimensionless parameter of hm/t. Furthermore, the tilt effect during the direct calibration procedure is corrected through spatial mapping transformation of atomic force microscopy data. Herein, the measured tip rounding radius fitted by 2D profile and 3D topography are 70 ± 4.8 nm and ∼72.83 nm, respectively. The indentation data acquired with the actual Berkovich indenter are used to verify the scaling relationships. The elastic modulus of ITO films is calculated as ∼135.26 GPa, and the measured error is only ∼3.59 %.

Abstract Image

考虑压头尖端圆弧缺陷的ITO薄膜压痕结垢关系研究
为了提高氧化铟锡(ITO)薄膜的应用,由于更复杂的应力状态和测试条件的限制对机械性能的影响很大,因此对测量提出了更高的要求。在这项工作中,通过有限元模拟和量纲分析,研究了尖端钝度对薄膜/衬底复合系统的压痕响应和缩放关系的影响。基于P-h曲线加载段曲率与材料性能的标度关系,提出了一种测量薄膜固有弹性模量的压痕方法。有限元模拟表明,尖端钝度对压痕响应有显著影响。然而,曲率基本上与hm/t的无量纲参数无关。此外,通过原子力显微镜数据的空间映射变换,对直接校准过程中的倾斜效应进行了校正。其中,测量到的二维轮廓和三维形貌拟合的尖端圆半径分别为70±4.8 nm和~ 72.83 nm。使用实际的Berkovich压痕器获得的压痕数据来验证缩放关系。计算得到ITO薄膜的弹性模量为~ 135.26 GPa,测量误差仅为~ 3.59%。
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来源期刊
Materials & Design
Materials & Design Engineering-Mechanical Engineering
CiteScore
14.30
自引率
7.10%
发文量
1028
审稿时长
85 days
期刊介绍: Materials and Design is a multi-disciplinary journal that publishes original research reports, review articles, and express communications. The journal focuses on studying the structure and properties of inorganic and organic materials, advancements in synthesis, processing, characterization, and testing, the design of materials and engineering systems, and their applications in technology. It aims to bring together various aspects of materials science, engineering, physics, and chemistry. The journal explores themes ranging from materials to design and aims to reveal the connections between natural and artificial materials, as well as experiment and modeling. Manuscripts submitted to Materials and Design should contain elements of discovery and surprise, as they often contribute new insights into the architecture and function of matter.
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