{"title":"An Optimized Hetero-gate Bandgap-Engineered SOI PNPN TFET with Hetero-dielectric BOX for Near-Complete Suppression of Ambipolar Current","authors":"Mahboob ul Haque, P. Vimala","doi":"10.1007/s12633-025-03332-5","DOIUrl":null,"url":null,"abstract":"<div><p>This paper presents a planar SOI Tunnel FET that integrates a source-side pocket, hetero-gate, hetero-dielectric BOX along with bandgap engineering. These design enhancements, implemented through 2D simulations, result in a significantly high ON current, an improved ON-to-OFF current ratio, and nearly complete suppression of ambipolar current. An optimum pocket is introduced near the source leading to full depletion of the pocket. A comprehensive analysis of partial depletion and full depletion conditions along with a detailed step by step flow for fabrication of the proposed device is presented. As part of bandgap engineering, SiGe is utilized as the source material. Additionally, the hetero-gate structure enhances the tunneling generation rate between the source and the channel, achieving an ON-current of 2 × 10<sup>–4</sup> A/µm and an OFF current of 3.37 × 10<sup>–15</sup> A/µm. The incorporation of a hetero-dielectric buried oxide (HDB) effectively suppresses ambipolar conduction up to a gate voltage of -1.1V. These design optimizations collectively yield a better ON-to-OFF current ratio of 6 × 10<sup>1</sup>⁰ and nearly eliminate OFF current. Furthermore, the device achieves a point subthreshold swing of approximately 20 mV/dec, making it a strong candidate for low-power and energy-efficient applications.</p></div>","PeriodicalId":776,"journal":{"name":"Silicon","volume":"17 9","pages":"2143 - 2153"},"PeriodicalIF":3.3000,"publicationDate":"2025-05-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Silicon","FirstCategoryId":"88","ListUrlMain":"https://link.springer.com/article/10.1007/s12633-025-03332-5","RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"CHEMISTRY, PHYSICAL","Score":null,"Total":0}
引用次数: 0
Abstract
This paper presents a planar SOI Tunnel FET that integrates a source-side pocket, hetero-gate, hetero-dielectric BOX along with bandgap engineering. These design enhancements, implemented through 2D simulations, result in a significantly high ON current, an improved ON-to-OFF current ratio, and nearly complete suppression of ambipolar current. An optimum pocket is introduced near the source leading to full depletion of the pocket. A comprehensive analysis of partial depletion and full depletion conditions along with a detailed step by step flow for fabrication of the proposed device is presented. As part of bandgap engineering, SiGe is utilized as the source material. Additionally, the hetero-gate structure enhances the tunneling generation rate between the source and the channel, achieving an ON-current of 2 × 10–4 A/µm and an OFF current of 3.37 × 10–15 A/µm. The incorporation of a hetero-dielectric buried oxide (HDB) effectively suppresses ambipolar conduction up to a gate voltage of -1.1V. These design optimizations collectively yield a better ON-to-OFF current ratio of 6 × 101⁰ and nearly eliminate OFF current. Furthermore, the device achieves a point subthreshold swing of approximately 20 mV/dec, making it a strong candidate for low-power and energy-efficient applications.
期刊介绍:
The journal Silicon is intended to serve all those involved in studying the role of silicon as an enabling element in materials science. There are no restrictions on disciplinary boundaries provided the focus is on silicon-based materials or adds significantly to the understanding of such materials. Accordingly, such contributions are welcome in the areas of inorganic and organic chemistry, physics, biology, engineering, nanoscience, environmental science, electronics and optoelectronics, and modeling and theory. Relevant silicon-based materials include, but are not limited to, semiconductors, polymers, composites, ceramics, glasses, coatings, resins, composites, small molecules, and thin films.