An Optimized Hetero-gate Bandgap-Engineered SOI PNPN TFET with Hetero-dielectric BOX for Near-Complete Suppression of Ambipolar Current

IF 3.3 3区 材料科学 Q3 CHEMISTRY, PHYSICAL
Silicon Pub Date : 2025-05-14 DOI:10.1007/s12633-025-03332-5
Mahboob ul Haque, P. Vimala
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引用次数: 0

Abstract

This paper presents a planar SOI Tunnel FET that integrates a source-side pocket, hetero-gate, hetero-dielectric BOX along with bandgap engineering. These design enhancements, implemented through 2D simulations, result in a significantly high ON current, an improved ON-to-OFF current ratio, and nearly complete suppression of ambipolar current. An optimum pocket is introduced near the source leading to full depletion of the pocket. A comprehensive analysis of partial depletion and full depletion conditions along with a detailed step by step flow for fabrication of the proposed device is presented. As part of bandgap engineering, SiGe is utilized as the source material. Additionally, the hetero-gate structure enhances the tunneling generation rate between the source and the channel, achieving an ON-current of 2 × 10–4 A/µm and an OFF current of 3.37 × 10–15 A/µm. The incorporation of a hetero-dielectric buried oxide (HDB) effectively suppresses ambipolar conduction up to a gate voltage of -1.1V. These design optimizations collectively yield a better ON-to-OFF current ratio of 6 × 101⁰ and nearly eliminate OFF current. Furthermore, the device achieves a point subthreshold swing of approximately 20 mV/dec, making it a strong candidate for low-power and energy-efficient applications.

带异质介质盒的杂栅带隙优化SOI PNPN TFET近乎完全抑制双极电流
本文提出了一种集成源侧口袋、异质栅极、异质介电盒以及带隙工程的平面SOI隧道场效应管。通过2D仿真实现的这些设计增强功能可以显著提高导通电流,改善导通与关断电流比,并几乎完全抑制双极电流。在源附近引入最佳口袋,导致口袋完全耗尽。对部分耗尽和完全耗尽条件进行了全面分析,并给出了制造所提出器件的详细逐级流程。作为带隙工程的一部分,SiGe被用作源材料。此外,异质栅结构提高了源极和通道之间的隧穿产生速率,实现了2 × 10-4 A/µm的通流和3.37 × 10-15 A/µm的关断电流。异质介质埋地氧化物(HDB)的掺入有效地抑制双极传导,直至栅极电压为-1.1V。这些设计优化共同产生6 × 101⁰更好的ON-to-OFF电流比,并且几乎消除了OFF电流。此外,该器件实现了约20 mV/dec的点亚阈值摆幅,使其成为低功耗和节能应用的有力候选者。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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来源期刊
Silicon
Silicon CHEMISTRY, PHYSICAL-MATERIALS SCIENCE, MULTIDISCIPLINARY
CiteScore
5.90
自引率
20.60%
发文量
685
审稿时长
>12 weeks
期刊介绍: The journal Silicon is intended to serve all those involved in studying the role of silicon as an enabling element in materials science. There are no restrictions on disciplinary boundaries provided the focus is on silicon-based materials or adds significantly to the understanding of such materials. Accordingly, such contributions are welcome in the areas of inorganic and organic chemistry, physics, biology, engineering, nanoscience, environmental science, electronics and optoelectronics, and modeling and theory. Relevant silicon-based materials include, but are not limited to, semiconductors, polymers, composites, ceramics, glasses, coatings, resins, composites, small molecules, and thin films.
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