Ultra-wide Dynamic Range 109 dB β-Ga2O3 Photodetector Array: Broadest Linear Response from Dim to Bright Light

Abstract

Ultraviolet C (UV–C) band holds significant applications, but current photodetectors are restricted due to their inadequacy in achieving optimal detection performance under both dim and bright illumination conditions. To address these challenges, we have developed an 8 × 8 β-Ga₂O₃ photodetector array that demonstrates superior linearity across an ultrawide dynamic range in the UV–C band, from dim to bright light (40 nW/cm² to 12.2 mW/cm²). This achievement represents the broadest detection range among current integrated array devices. Moreover, our fabricated array exhibits excellent uniformity, with a photocurrent of 1.56 μA (σ = 0.229 μA), all devices conforming to the 3σ distribution. Our device demonstrates superior image processing capabilities, achieving recognition accuracies of 87.27% and 85.55% under dim and bright illumination conditions, respectively. Furthermore, the data set processed utilizing the light intensity-to-photocurrent linearity relationship of our device attained an approximate recognition accuracy of 91%, comparable to that of the original data set. These results signify a notable advancement in UV–C photodetection technology and machine vision applications.