UV Stability of Aluminum Oxide Fabricated with Tube-Type Plasma-Enhanced Atomic Layer Deposition

IF 6 3区 工程技术 Q2 ENERGY & FUELS
Solar RRL Pub Date : 2025-08-27 DOI:10.1002/solr.202500510
Christina Hollemann, Byungsul Min, Viet X. Nguyen, Thomas Pernau, Daniela Seiffert, Helge Haverkamp, Rolf Brendel, Henning Schulte-Huxel
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引用次数: 0

Abstract

Ultraviolet (UV)-induced degradation is a critical issue for modern photovoltaic (PV) technologies such as passivated emitter and rear cell (PERC), tunnel oxide-passivated contact (TOPCon), and heterojunction (HJT) cell concepts. This study compares the stability against UV radiation of AlOx/SiNy stacks on mini-modules with p-type back junction solar cells. Our cells have a nondiffused textured front surface passivated with an AlOx/SiNy layer stack and feature passivating polysilicon on oxide rear contacts. We compare plasma-enhanced chemical vapor deposition (PECVD) and plasma-enhanced atomic layer deposition (PEALD) processes for the deposition of AlOx layers using the same tube-type deposition system. After a UV dose of 146 kWh/m2 using broadband UV lamps, modules with PECVD-AlOx exhibit an efficiency loss of up to 27% while those with PEALD-AlOx show minimal degradation of 2.5%. This comparison proves that the superior UV stability is achieved with the tube-type PEALD technique. Our findings thus show how UV stability can be improved without extra equipment dedicated solely to depositing ALD-AlOx and without UV absorbing or down converting encapsulants.

Abstract Image

管型等离子体增强原子层沉积制备氧化铝的紫外稳定性
紫外线(UV)诱导降解是现代光伏(PV)技术的关键问题,如钝化发射极和后端电池(PERC)、隧道氧化物钝化接触(TOPCon)和异质结(HJT)电池概念。本研究比较了p型后结太阳能电池微型组件上AlOx/SiNy堆叠对紫外线辐射的稳定性。我们的电池有一个非扩散的纹理前表面,用AlOx/SiNy层堆栈钝化,并在氧化物后触点上具有钝化多晶硅。我们比较了等离子体增强化学气相沉积(PECVD)和等离子体增强原子层沉积(PEALD)工艺,使用相同的管型沉积系统沉积AlOx层。在使用宽带紫外灯照射146 kWh/m2的紫外线剂量后,PECVD-AlOx模块的效率损失高达27%,而PEALD-AlOx模块的效率下降幅度最小,为2.5%。通过比较,证明了管型PEALD技术具有较好的紫外稳定性。因此,我们的研究结果表明,在没有专门用于沉积ALD-AlOx的额外设备,也没有紫外线吸收或down转换封装剂的情况下,如何提高紫外线稳定性。
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来源期刊
Solar RRL
Solar RRL Physics and Astronomy-Atomic and Molecular Physics, and Optics
CiteScore
12.10
自引率
6.30%
发文量
460
期刊介绍: Solar RRL, formerly known as Rapid Research Letters, has evolved to embrace a broader and more encompassing format. We publish Research Articles and Reviews covering all facets of solar energy conversion. This includes, but is not limited to, photovoltaics and solar cells (both established and emerging systems), as well as the development, characterization, and optimization of materials and devices. Additionally, we cover topics such as photovoltaic modules and systems, their installation and deployment, photocatalysis, solar fuels, photothermal and photoelectrochemical solar energy conversion, energy distribution, grid issues, and other relevant aspects. Join us in exploring the latest advancements in solar energy conversion research.
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