Christina Hollemann, Byungsul Min, Viet X. Nguyen, Thomas Pernau, Daniela Seiffert, Helge Haverkamp, Rolf Brendel, Henning Schulte-Huxel
{"title":"UV Stability of Aluminum Oxide Fabricated with Tube-Type Plasma-Enhanced Atomic Layer Deposition","authors":"Christina Hollemann, Byungsul Min, Viet X. Nguyen, Thomas Pernau, Daniela Seiffert, Helge Haverkamp, Rolf Brendel, Henning Schulte-Huxel","doi":"10.1002/solr.202500510","DOIUrl":null,"url":null,"abstract":"<p>Ultraviolet (UV)-induced degradation is a critical issue for modern photovoltaic (PV) technologies such as passivated emitter and rear cell (PERC), tunnel oxide-passivated contact (TOPCon), and heterojunction (HJT) cell concepts. This study compares the stability against UV radiation of AlO<sub><i>x</i></sub>/SiN<sub><i>y</i></sub> stacks on mini-modules with p-type back junction solar cells. Our cells have a nondiffused textured front surface passivated with an AlO<sub><i>x</i></sub>/SiN<sub><i>y</i></sub> layer stack and feature passivating polysilicon on oxide rear contacts. We compare plasma-enhanced chemical vapor deposition (PECVD) and plasma-enhanced atomic layer deposition (PEALD) processes for the deposition of AlO<sub><i>x</i></sub> layers using the same tube-type deposition system. After a UV dose of 146 kWh/m<sup>2</sup> using broadband UV lamps, modules with PECVD-AlO<sub><i>x</i></sub> exhibit an efficiency loss of up to 27% while those with PEALD-AlO<sub><i>x</i></sub> show minimal degradation of 2.5%. This comparison proves that the superior UV stability is achieved with the tube-type PEALD technique. Our findings thus show how UV stability can be improved without extra equipment dedicated solely to depositing ALD-AlO<sub><i>x</i></sub> and without UV absorbing or down converting encapsulants.</p>","PeriodicalId":230,"journal":{"name":"Solar RRL","volume":"9 18","pages":""},"PeriodicalIF":6.0000,"publicationDate":"2025-08-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Solar RRL","FirstCategoryId":"5","ListUrlMain":"https://onlinelibrary.wiley.com/doi/10.1002/solr.202500510","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENERGY & FUELS","Score":null,"Total":0}
引用次数: 0
Abstract
Ultraviolet (UV)-induced degradation is a critical issue for modern photovoltaic (PV) technologies such as passivated emitter and rear cell (PERC), tunnel oxide-passivated contact (TOPCon), and heterojunction (HJT) cell concepts. This study compares the stability against UV radiation of AlOx/SiNy stacks on mini-modules with p-type back junction solar cells. Our cells have a nondiffused textured front surface passivated with an AlOx/SiNy layer stack and feature passivating polysilicon on oxide rear contacts. We compare plasma-enhanced chemical vapor deposition (PECVD) and plasma-enhanced atomic layer deposition (PEALD) processes for the deposition of AlOx layers using the same tube-type deposition system. After a UV dose of 146 kWh/m2 using broadband UV lamps, modules with PECVD-AlOx exhibit an efficiency loss of up to 27% while those with PEALD-AlOx show minimal degradation of 2.5%. This comparison proves that the superior UV stability is achieved with the tube-type PEALD technique. Our findings thus show how UV stability can be improved without extra equipment dedicated solely to depositing ALD-AlOx and without UV absorbing or down converting encapsulants.
Solar RRLPhysics and Astronomy-Atomic and Molecular Physics, and Optics
CiteScore
12.10
自引率
6.30%
发文量
460
期刊介绍:
Solar RRL, formerly known as Rapid Research Letters, has evolved to embrace a broader and more encompassing format. We publish Research Articles and Reviews covering all facets of solar energy conversion. This includes, but is not limited to, photovoltaics and solar cells (both established and emerging systems), as well as the development, characterization, and optimization of materials and devices. Additionally, we cover topics such as photovoltaic modules and systems, their installation and deployment, photocatalysis, solar fuels, photothermal and photoelectrochemical solar energy conversion, energy distribution, grid issues, and other relevant aspects. Join us in exploring the latest advancements in solar energy conversion research.