Interference Techniques for Measuring the Surface Profile of Extended Samples

IF 0.4 Q4 PHYSICS, CONDENSED MATTER

Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques Pub Date : 2025-09-25 DOI:10.1134/S1027451025700995

A. D. Akhsakhalyan, M. S. Mikhailenko, A. E. Pestov, E. V. Petrakov, E. I. Glushkov, A. K. Chernyshev, N. I. Chkhalo

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Abstract

Two interference techniques for measuring the surface profile of extended samples from 60 to 200 mm in length have been developed. The profile is reconstructed by gluing separate frames taken with overlapping. It has been found that the angular reproducibility of the reconstructed profile in both techniques is less than 10 μrad, which corresponds to a profile height difference of about 10 nm. When measuring surfaces with curvature radii R > 1 m, it is recommended to use the stitching technique on a Zygo Verifire 4 highly coherent interferometer, which provides a complete surface map. For surfaces with curvature radii R < 1 m, only the stitching technique on a SuperView W1 white light interferometer is suitable. For particularly important measurements, it is advisable to use both methods to achieve maximum measurement accuracy. The results of the study confirm the effectiveness of the proposed approaches in the field of interference metrological control.

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扩展样品表面轮廓测量的干涉技术

开发了两种干涉技术，用于测量长度从60到200毫米的扩展样品的表面轮廓。通过粘合重叠的单独帧来重建轮廓。结果表明，两种方法重建轮廓的角度再现性均小于10 μrad，对应的轮廓高度差约为10 nm。当测量曲率半径为R >； 1 m的表面时，建议在Zygo Verifire 4高相干干涉仪上使用拼接技术，该干涉仪可提供完整的表面图。对于曲率半径为R <； 1 m的曲面，仅适用于SuperView W1白光干涉仪上的拼接技术。对于特别重要的测量，建议使用两种方法以达到最大的测量精度。研究结果证实了所提方法在干涉计量控制领域的有效性。

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来源期刊

Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques PHYSICS, CONDENSED MATTER-

CiteScore

0.90

自引率

25.00%

发文量

144

审稿时长

3-8 weeks

期刊介绍： Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques publishes original articles on the topical problems of solid-state physics, materials science, experimental techniques, condensed media, nanostructures, surfaces of thin films, and phase boundaries: geometric and energetical structures of surfaces, the methods of computer simulations; physical and chemical properties and their changes upon radiation and other treatments; the methods of studies of films and surface layers of crystals (XRD, XPS, synchrotron radiation, neutron and electron diffraction, electron microscopic, scanning tunneling microscopic, atomic force microscopic studies, and other methods that provide data on the surfaces and thin films). Articles related to the methods and technics of structure studies are the focus of the journal. The journal accepts manuscripts of regular articles and reviews in English or Russian language from authors of all countries. All manuscripts are peer-reviewed.