ECR Light Ion Source

IF 0.4 Q4 PHYSICS, CONDENSED MATTER

Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques Pub Date : 2025-09-25 DOI:10.1134/S102745102570096X

K. E. Prianishnikov, D. N. Seleznev, A. B. Zarubin, N. N. Vinogradskii, P. A. Fedin, T. V. Kulevoy

引用次数: 0

Abstract

This article describes the development and adjustment of two designs of ion sources generating plasma at a frequency of 2.45 GHz. These ion sources operate in the modes with ECR discharge and RF-discharge. The working gas of the sources is helium or hydrogen. The extraction and beam formation system currently represents two-electrode optics. The diameter of the emission hole is 4 mm. At an accelerating voltage of 25 kV in the pulsed mode. The ion beam current was 7 mA (He⁺) with a helium ion fraction of up to 70% and 14 mA (H⁺) with a proton ion fraction of up to 90%.

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ECR离子光源

本文介绍了产生2.45 GHz频率等离子体的两种离子源设计的发展和调整。这些离子源在ECR放电和rf放电模式下工作。气源的工作气体是氦或氢。提取和光束形成系统目前采用双电极光学。发射孔直径为4mm。在脉冲模式下加速电压为25kv。离子束电流为7 mA (He+)，氦离子分数高达70%；14 mA (H+)，质子离子分数高达90%。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques PHYSICS, CONDENSED MATTER-

CiteScore

0.90

自引率

25.00%

发文量

144

审稿时长

3-8 weeks

期刊介绍： Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques publishes original articles on the topical problems of solid-state physics, materials science, experimental techniques, condensed media, nanostructures, surfaces of thin films, and phase boundaries: geometric and energetical structures of surfaces, the methods of computer simulations; physical and chemical properties and their changes upon radiation and other treatments; the methods of studies of films and surface layers of crystals (XRD, XPS, synchrotron radiation, neutron and electron diffraction, electron microscopic, scanning tunneling microscopic, atomic force microscopic studies, and other methods that provide data on the surfaces and thin films). Articles related to the methods and technics of structure studies are the focus of the journal. The journal accepts manuscripts of regular articles and reviews in English or Russian language from authors of all countries. All manuscripts are peer-reviewed.