{"title":"Control of the Plate Movement in Extreme Ultraviolet Scanners Based on Optimal Performance Algorithms","authors":"E. V. Petrakov, D. V. Balandin","doi":"10.1134/S1027451025701009","DOIUrl":null,"url":null,"abstract":"<p>This article discusses the control of the lithographic plate movement in extreme ultraviolet scanners using optimal performance algorithms. The relevance of the topic is due to the new requirements of the semiconductor industry for positioning accuracy during the exposure of silicon substrates. Issues arising from chatter, unwanted oscillations caused by magnetostrictive drives, are addressed. An approach based on Pontryagin’s maximum principle and sliding mode control methods is proposed for damping oscillations. Various control functions, including the signum function and hyperbolic tangent, are investigated to minimize the negative impact of chatter on the mechanical system. Simulation results show that the use of smooth control functions effectively suppresses oscillations and increases positioning accuracy, which is critical for the fabrication of complex integrated circuits.</p>","PeriodicalId":671,"journal":{"name":"Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques","volume":"19 3","pages":"676 - 683"},"PeriodicalIF":0.4000,"publicationDate":"2025-09-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques","FirstCategoryId":"1085","ListUrlMain":"https://link.springer.com/article/10.1134/S1027451025701009","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"PHYSICS, CONDENSED MATTER","Score":null,"Total":0}
引用次数: 0
Abstract
This article discusses the control of the lithographic plate movement in extreme ultraviolet scanners using optimal performance algorithms. The relevance of the topic is due to the new requirements of the semiconductor industry for positioning accuracy during the exposure of silicon substrates. Issues arising from chatter, unwanted oscillations caused by magnetostrictive drives, are addressed. An approach based on Pontryagin’s maximum principle and sliding mode control methods is proposed for damping oscillations. Various control functions, including the signum function and hyperbolic tangent, are investigated to minimize the negative impact of chatter on the mechanical system. Simulation results show that the use of smooth control functions effectively suppresses oscillations and increases positioning accuracy, which is critical for the fabrication of complex integrated circuits.
期刊介绍：
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques publishes original articles on the topical problems of solid-state physics, materials science, experimental techniques, condensed media, nanostructures, surfaces of thin films, and phase boundaries: geometric and energetical structures of surfaces, the methods of computer simulations; physical and chemical properties and their changes upon radiation and other treatments; the methods of studies of films and surface layers of crystals (XRD, XPS, synchrotron radiation, neutron and electron diffraction, electron microscopic, scanning tunneling microscopic, atomic force microscopic studies, and other methods that provide data on the surfaces and thin films). Articles related to the methods and technics of structure studies are the focus of the journal. The journal accepts manuscripts of regular articles and reviews in English or Russian language from authors of all countries. All manuscripts are peer-reviewed.
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