Study on the interface interaction between the chip backside metallization and solder alloys of power semiconductor modules

IF 2.8 4区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC
Shilin Zhao, Erxian Yao, Chunbiao Wang, Yan Tong
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Abstract

Power semiconductor modules are the core device of the electrical power conversion system, whose chip-solder interface is one of the weak points that can cause module failure, requiring an in-depth investigation. In this work, the effect of chip backside metallization (BSM), solder alloy, and solder condition on the interface reaction during reflow soldering was investigated. The interface bonding performance was further evaluated via accelerated aging tests like HTS (High temperature storage) and HTRB (High humidity, high temperature reverse biased). Results show that when the chip BSM of the Al–Ti–Ni–Ag reacted with Sn-based solders, it formed (Cu, Ni)6Sn5 intermetallic compound (IMC) with the SAC305 solder, whereas with SnSb5, it probably yielded (Cu, Ni)6(Sn, Sb)5. An overly thin initial Ni layer of chip BSM became depleted during the reaction, resulting in a discontinuous interface IMC layer and the dewetting between the Ti layer and IMCs. This discontinuity is more pronounced when SnSb5 solder is employed. A thicker Ni layer can ensure a continuous interface IMC layer and a higher interface bonding strength, though it leads to more interface Kirkendall voids. Increasing solder temperature and time can promote IMCs to dissolve into the solder melt, resulting in the IMC layer drifting into the solder interior. The HTS test can facilitate IMC growth and decrease interface strength, without accompanying IMC phase transformation. Delamination occurred at the interface employed the thin initial Ni layer during the HTRB test, evidencing that the inappropriate chip BSM-solder matching reduces interface reliability.

功率半导体模块芯片背面金属化与焊料合金界面相互作用研究
功率半导体模块是电力转换系统的核心器件,其芯片-焊料接口是导致模块失效的薄弱环节之一,需要深入研究。本文研究了芯片背面金属化(BSM)、焊料合金和焊料条件对回流焊界面反应的影响。通过HTS(高温贮存)和HTRB(高湿高温反向偏置)等加速老化试验进一步评价界面粘结性能。结果表明:Al-Ti-Ni-Ag晶片BSM与Sn基钎料反应时,与SAC305钎料形成(Cu, Ni)6Sn5金属间化合物(IMC),而与SnSb5反应时,可能生成(Cu, Ni)6(Sn, Sb)5;在反应过程中,晶片BSM的初始Ni层被耗尽,导致界面IMC层不连续,Ti层与IMC之间脱湿。当使用SnSb5焊料时,这种不连续性更为明显。较厚的Ni层可以保证界面IMC层的连续性和较高的界面结合强度,但会导致更多的界面Kirkendall空洞。提高焊接温度和时间可以促进IMC溶解到焊料熔体中,导致IMC层漂移到焊料内部。高温高温试验可以促进IMC生长,降低界面强度,但不会伴随IMC相变。在HTRB测试中,采用薄初始Ni层的界面发生分层,证明不适当的芯片bsm -焊料匹配降低了界面的可靠性。
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来源期刊
Journal of Materials Science: Materials in Electronics
Journal of Materials Science: Materials in Electronics 工程技术-材料科学:综合
CiteScore
5.00
自引率
7.10%
发文量
1931
审稿时长
2 months
期刊介绍: The Journal of Materials Science: Materials in Electronics is an established refereed companion to the Journal of Materials Science. It publishes papers on materials and their applications in modern electronics, covering the ground between fundamental science, such as semiconductor physics, and work concerned specifically with applications. It explores the growth and preparation of new materials, as well as their processing, fabrication, bonding and encapsulation, together with the reliability, failure analysis, quality assurance and characterization related to the whole range of applications in electronics. The Journal presents papers in newly developing fields such as low dimensional structures and devices, optoelectronics including III-V compounds, glasses and linear/non-linear crystal materials and lasers, high Tc superconductors, conducting polymers, thick film materials and new contact technologies, as well as the established electronics device and circuit materials.
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