Design of a micro-Raman spectroscopy chamber for operando studies on semiconductor gas sensors

IF 3.7 1区化学 Q1 CHEMISTRY, ANALYTICAL

Sensors and Actuators B: Chemical Pub Date : 2025-09-19 DOI:10.1016/j.snb.2025.138715

Matteo Valt , Guglielmo Trentini , Pietro Tosato , Giada Bombardelli , Antonio Orlando , Marco Magoni , Rossana Dell’Anna , Andrea Gaiardo , Barbara Fabbri

{"title":"Design of a micro-Raman spectroscopy chamber for operando studies on semiconductor gas sensors","authors":"Matteo Valt , Guglielmo Trentini , Pietro Tosato , Giada Bombardelli , Antonio Orlando , Marco Magoni , Rossana Dell’Anna , Andrea Gaiardo , Barbara Fabbri","doi":"10.1016/j.snb.2025.138715","DOIUrl":null,"url":null,"abstract":"<div><div>This work outlines the design and validation of an ambient chamber specifically tailored for confocal micro-Raman spectroscopy investigations on semiconductor gas sensors under operando conditions. The system enables real-time analysis of gas–solid interactions providing a reproducible and versatile platform for the characterization of a wide range of gas-sensing devices. A comprehensive study was carried out, covering chamber design, 3D modeling, integration with a custom data acquisition system, residence time distribution analysis for fluid dynamics assessment, temperature and humidity monitoring. Finally, the system was validated using an indium oxide-based sensor exposed to ethanol. The proposed gas-sensing setup is designed to be easy to fabricate, operate, and maintain. It supports solid-state gas sensors with sub-millimeter active areas and can operate at temperatures up to 500 °C achieving high-resolution spectroscopic measurements. Furthermore, its modular architecture ensures seamless integration with various microscopy platforms, enhancing the quality and flexibility of spectral acquisition.</div></div>","PeriodicalId":425,"journal":{"name":"Sensors and Actuators B: Chemical","volume":"447 ","pages":"Article 138715"},"PeriodicalIF":3.7000,"publicationDate":"2025-09-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Sensors and Actuators B: Chemical","FirstCategoryId":"92","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0925400525014911","RegionNum":1,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"CHEMISTRY, ANALYTICAL","Score":null,"Total":0}

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Abstract

This work outlines the design and validation of an ambient chamber specifically tailored for confocal micro-Raman spectroscopy investigations on semiconductor gas sensors under operando conditions. The system enables real-time analysis of gas–solid interactions providing a reproducible and versatile platform for the characterization of a wide range of gas-sensing devices. A comprehensive study was carried out, covering chamber design, 3D modeling, integration with a custom data acquisition system, residence time distribution analysis for fluid dynamics assessment, temperature and humidity monitoring. Finally, the system was validated using an indium oxide-based sensor exposed to ethanol. The proposed gas-sensing setup is designed to be easy to fabricate, operate, and maintain. It supports solid-state gas sensors with sub-millimeter active areas and can operate at temperatures up to 500 °C achieving high-resolution spectroscopic measurements. Furthermore, its modular architecture ensures seamless integration with various microscopy platforms, enhancing the quality and flexibility of spectral acquisition.

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半导体气体传感器操作研究用微拉曼光谱室设计

这项工作概述了一个专门为半导体气体传感器在操作条件下的共聚焦微拉曼光谱研究量身定制的环境室的设计和验证。该系统能够实时分析气固相互作用，为各种气体传感设备的表征提供了一个可重复的通用平台。进行了全面的研究，包括腔室设计、三维建模、与定制数据采集系统的集成、流体动力学评估的停留时间分布分析、温度和湿度监测。最后，使用暴露于乙醇中的氧化铟传感器对系统进行验证。所提出的气敏装置设计为易于制造，操作和维护。它支持具有亚毫米有源区域的固态气体传感器，可以在高达500°C的温度下工作，实现高分辨率光谱测量。此外，其模块化架构确保了与各种显微镜平台的无缝集成，提高了光谱采集的质量和灵活性。

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来源期刊

Sensors and Actuators B: Chemical 工程技术-电化学

CiteScore

14.60

自引率

11.90%

发文量

1776

审稿时长

3.2 months

期刊介绍： Sensors & Actuators, B: Chemical is an international journal focused on the research and development of chemical transducers. It covers chemical sensors and biosensors, chemical actuators, and analytical microsystems. The journal is interdisciplinary, aiming to publish original works showcasing substantial advancements beyond the current state of the art in these fields, with practical applicability to solving meaningful analytical problems. Review articles are accepted by invitation from an Editor of the journal.