TCAD-Based Analysis of a Novel Dual Dielectric Gate MOSFET for High-Speed Applications

IF 3.3 3区 材料科学 Q3 CHEMISTRY, PHYSICAL
Silicon Pub Date : 2025-07-16 DOI:10.1007/s12633-025-03386-5
Ahmed S. Al-Jawadi, Mohammad Tariq Yaseen, Qais Thanon Algwari
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引用次数: 0

Abstract

Short-channel effects (SCEs) and mobility degradation remain significant barriers to MOSFET scaling. This study proposes novel asymmetric dual oxide MOSFET structures with a 20 nm gate length, utilizing different gate oxide materials (TiO₂ and HfO₂) and both single and dual metal gate configurations. These designs are optimized through gate work function engineering to enhance device performance. Simulations using Silvaco TCAD confirm that the proposed structures particularly the Dual Metal Asymmetric Dual Oxide (DMADO) configuration offer significant improvements in ON current, switching efficiency, and suppression of short-channel effects. The results indicate the potential of these architectures for future high-performance, low-power nanoelectronic applications.

基于tcad的新型高速双介电栅MOSFET分析
短通道效应(sce)和迁移率退化仍然是MOSFET缩放的重要障碍。本研究提出了一种新型的非对称双氧化物MOSFET结构,栅极长度为20 nm,使用不同的栅极氧化物材料(TiO₂和HfO₂)以及单金属栅极和双金属栅极结构。这些设计通过栅极功功能工程进行优化,以提高器件性能。使用Silvaco TCAD进行的模拟证实,所提出的结构,特别是双金属不对称双氧化物(DMADO)结构,在导通电流、开关效率和抑制短通道效应方面有显著改善。结果表明,这些结构在未来的高性能、低功耗纳米电子应用中具有潜力。
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来源期刊
Silicon
Silicon CHEMISTRY, PHYSICAL-MATERIALS SCIENCE, MULTIDISCIPLINARY
CiteScore
5.90
自引率
20.60%
发文量
685
审稿时长
>12 weeks
期刊介绍: The journal Silicon is intended to serve all those involved in studying the role of silicon as an enabling element in materials science. There are no restrictions on disciplinary boundaries provided the focus is on silicon-based materials or adds significantly to the understanding of such materials. Accordingly, such contributions are welcome in the areas of inorganic and organic chemistry, physics, biology, engineering, nanoscience, environmental science, electronics and optoelectronics, and modeling and theory. Relevant silicon-based materials include, but are not limited to, semiconductors, polymers, composites, ceramics, glasses, coatings, resins, composites, small molecules, and thin films.
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