Robust Numerical Solver for Nonlinear Semiconductor Problems

IF 4.5 1区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

IEEE Transactions on Microwave Theory and Techniques Pub Date : 2025-07-08 DOI:10.1109/TMTT.2025.3576061

Mario Kupresak;Bruno Eckmann;Johannes Hoffmann;Michael Baumann;Philippe Peter;Jasmin Smajic;Juerg Leuthold

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Abstract

In this work, we develop a numerical solver, efficiently and robustly treating highly nonlinear semiconductor device problems. Beyond the capabilities of commercial tools, the solver can compute the time-domain capacitance and the spectrum of the device current. The solver is based on the finite element method (FEM) and employs the successive under-relaxation scheme. Its capability has been assessed and validated in a study of an axisymmetric metal-oxide–semiconductor (MOS) structure, presenting an archetypal scanning microwave microscopy (SMM) calibration sample, with both n- and p-doped semiconductors, including different excitation sources. Excellent agreement was obtained, when testing the tool against features of a commercial tool. By computing the capacitance for the applied low-frequency (LF) bias, combined with a high-frequency (HF) probe signal, the spectrum of the current flowing in the structure was evaluated, revealing mix-product components. This allowed us to verify the solver against measurements, resulting in a very good agreement.

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非线性半导体问题的鲁棒数值求解器

在这项工作中，我们开发了一个数值求解器，有效而稳健地处理高度非线性的半导体器件问题。超越商业工具的能力，求解器可以计算时域电容和器件电流的频谱。求解基于有限元法，采用逐次欠松弛格式。在轴对称金属氧化物半导体（MOS）结构的研究中，对其能力进行了评估和验证，给出了一个原型扫描微波显微镜（SMM）校准样品，其中包括n和p掺杂的半导体，包括不同的激发源。当对一个商业工具的特性进行测试时，获得了很好的一致性。通过计算施加低频偏置的电容，结合高频探头信号，评估了流过该结构的电流的频谱，揭示了混合产物成分。这使我们能够根据测量结果验证求解器，从而得到非常好的一致性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

IEEE Transactions on Microwave Theory and Techniques 工程技术-工程：电子与电气

CiteScore

8.60

自引率

18.60%

发文量

486

审稿时长

6 months

期刊介绍： The IEEE Transactions on Microwave Theory and Techniques focuses on that part of engineering and theory associated with microwave/millimeter-wave components, devices, circuits, and systems involving the generation, modulation, demodulation, control, transmission, and detection of microwave signals. This includes scientific, technical, and industrial, activities. Microwave theory and techniques relates to electromagnetic waves usually in the frequency region between a few MHz and a THz; other spectral regions and wave types are included within the scope of the Society whenever basic microwave theory and techniques can yield useful results. Generally, this occurs in the theory of wave propagation in structures with dimensions comparable to a wavelength, and in the related techniques for analysis and design.