Nd:YAG/Si crystal integration via room-temperature surface activated bonding

IF 3.9 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY
Ningkang Deng , Jin Yuan , Yongfeng Qu , Liang Du , Wenbo Hu , Zhaoyang Zhang , Shengli Wu , Kang Wang , Hongxing Wang
{"title":"Nd:YAG/Si crystal integration via room-temperature surface activated bonding","authors":"Ningkang Deng ,&nbsp;Jin Yuan ,&nbsp;Yongfeng Qu ,&nbsp;Liang Du ,&nbsp;Wenbo Hu ,&nbsp;Zhaoyang Zhang ,&nbsp;Shengli Wu ,&nbsp;Kang Wang ,&nbsp;Hongxing Wang","doi":"10.1016/j.vacuum.2025.114739","DOIUrl":null,"url":null,"abstract":"<div><div>To suppress the thermal effect of Nd:YAG lasers, heterogeneous integration of Nd:YAG crystal and Si wafer was explored using ultra-high vacuum surface-activated bonding (SAB), and the effect of the Si-based microchannel heat sink on the internal temperature of Nd:YAG crystal was investigated by numerical simulation. Nd:YAG/Si crystal integration was achieved at room temperature, exhibiting a 21.2-nm-thick, void-free interface layer containing Fe. The bonding strength of the Nd:YAG/Si composite crystal reached 4.6 MPa due to the formation of Fe-Si and Fe-O bonds at the bonding interface. Under cooling by a Si-based microchannel heat sink, the maximum temperature in the Nd:YAG crystal bonded on the heat sink by SAB was 12.1 K lower than that in the same crystal bonded on the heat sink by indium soldering. The research result demonstrates that Nd:YAG/Si crystal integration based on SAB holds great promise for addressing the heat-dissipation challenges of high-power Nd:YAG lasers.</div></div>","PeriodicalId":23559,"journal":{"name":"Vacuum","volume":"242 ","pages":"Article 114739"},"PeriodicalIF":3.9000,"publicationDate":"2025-09-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Vacuum","FirstCategoryId":"88","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0042207X25007298","RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
引用次数: 0

Abstract

To suppress the thermal effect of Nd:YAG lasers, heterogeneous integration of Nd:YAG crystal and Si wafer was explored using ultra-high vacuum surface-activated bonding (SAB), and the effect of the Si-based microchannel heat sink on the internal temperature of Nd:YAG crystal was investigated by numerical simulation. Nd:YAG/Si crystal integration was achieved at room temperature, exhibiting a 21.2-nm-thick, void-free interface layer containing Fe. The bonding strength of the Nd:YAG/Si composite crystal reached 4.6 MPa due to the formation of Fe-Si and Fe-O bonds at the bonding interface. Under cooling by a Si-based microchannel heat sink, the maximum temperature in the Nd:YAG crystal bonded on the heat sink by SAB was 12.1 K lower than that in the same crystal bonded on the heat sink by indium soldering. The research result demonstrates that Nd:YAG/Si crystal integration based on SAB holds great promise for addressing the heat-dissipation challenges of high-power Nd:YAG lasers.
室温表面活化键合制备Nd:YAG/Si晶体
为了抑制Nd:YAG激光器的热效应,采用超高真空表面激活键合(SAB)技术研究了Nd:YAG晶体与硅片的非均相集成,并通过数值模拟研究了硅基微通道散热器对Nd:YAG晶体内部温度的影响。Nd:YAG/Si晶体在室温下实现了集成,呈现出21.2 nm厚、含铁的无空洞界面层。Nd:YAG/Si复合晶体的结合强度达到4.6 MPa,主要是由于在结合界面处形成了Fe-Si和Fe-O键。在硅基微通道散热器冷却下,SAB焊接Nd:YAG晶体的最高温度比铟焊接Nd:YAG晶体的最高温度低12.1 K。研究结果表明,基于SAB的Nd:YAG/Si晶体集成对于解决高功率Nd:YAG激光器的散热挑战具有很大的希望。
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来源期刊
Vacuum
Vacuum 工程技术-材料科学:综合
CiteScore
6.80
自引率
17.50%
发文量
0
审稿时长
34 days
期刊介绍: Vacuum is an international rapid publications journal with a focus on short communication. All papers are peer-reviewed, with the review process for short communication geared towards very fast turnaround times. The journal also published full research papers, thematic issues and selected papers from leading conferences. A report in Vacuum should represent a major advance in an area that involves a controlled environment at pressures of one atmosphere or below. The scope of the journal includes: 1. Vacuum; original developments in vacuum pumping and instrumentation, vacuum measurement, vacuum gas dynamics, gas-surface interactions, surface treatment for UHV applications and low outgassing, vacuum melting, sintering, and vacuum metrology. Technology and solutions for large-scale facilities (e.g., particle accelerators and fusion devices). New instrumentation ( e.g., detectors and electron microscopes). 2. Plasma science; advances in PVD, CVD, plasma-assisted CVD, ion sources, deposition processes and analysis. 3. Surface science; surface engineering, surface chemistry, surface analysis, crystal growth, ion-surface interactions and etching, nanometer-scale processing, surface modification. 4. Materials science; novel functional or structural materials. Metals, ceramics, and polymers. Experiments, simulations, and modelling for understanding structure-property relationships. Thin films and coatings. Nanostructures and ion implantation.
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