Ningkang Deng , Jin Yuan , Yongfeng Qu , Liang Du , Wenbo Hu , Zhaoyang Zhang , Shengli Wu , Kang Wang , Hongxing Wang
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引用次数: 0
Abstract
To suppress the thermal effect of Nd:YAG lasers, heterogeneous integration of Nd:YAG crystal and Si wafer was explored using ultra-high vacuum surface-activated bonding (SAB), and the effect of the Si-based microchannel heat sink on the internal temperature of Nd:YAG crystal was investigated by numerical simulation. Nd:YAG/Si crystal integration was achieved at room temperature, exhibiting a 21.2-nm-thick, void-free interface layer containing Fe. The bonding strength of the Nd:YAG/Si composite crystal reached 4.6 MPa due to the formation of Fe-Si and Fe-O bonds at the bonding interface. Under cooling by a Si-based microchannel heat sink, the maximum temperature in the Nd:YAG crystal bonded on the heat sink by SAB was 12.1 K lower than that in the same crystal bonded on the heat sink by indium soldering. The research result demonstrates that Nd:YAG/Si crystal integration based on SAB holds great promise for addressing the heat-dissipation challenges of high-power Nd:YAG lasers.
期刊介绍:
Vacuum is an international rapid publications journal with a focus on short communication. All papers are peer-reviewed, with the review process for short communication geared towards very fast turnaround times. The journal also published full research papers, thematic issues and selected papers from leading conferences.
A report in Vacuum should represent a major advance in an area that involves a controlled environment at pressures of one atmosphere or below.
The scope of the journal includes:
1. Vacuum; original developments in vacuum pumping and instrumentation, vacuum measurement, vacuum gas dynamics, gas-surface interactions, surface treatment for UHV applications and low outgassing, vacuum melting, sintering, and vacuum metrology. Technology and solutions for large-scale facilities (e.g., particle accelerators and fusion devices). New instrumentation ( e.g., detectors and electron microscopes).
2. Plasma science; advances in PVD, CVD, plasma-assisted CVD, ion sources, deposition processes and analysis.
3. Surface science; surface engineering, surface chemistry, surface analysis, crystal growth, ion-surface interactions and etching, nanometer-scale processing, surface modification.
4. Materials science; novel functional or structural materials. Metals, ceramics, and polymers. Experiments, simulations, and modelling for understanding structure-property relationships. Thin films and coatings. Nanostructures and ion implantation.