A review of nano-reactive multilayered films and their applications in micro-energetic igniters

IF 3.6

FirePhysChem Pub Date : 2025-08-01 DOI:10.1016/j.fpc.2025.01.001

Jianbing Xu , Jiangtao Zhang , Yinghua Ye , Yuxuan Zhou , Yuan Lai , Ruiqi Shen

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Abstract

Nano-reactive multilayer films consisting of alternating layers of the nano-aluminum and nano-metal oxide is a new type of nano thermite. These multilayer films can be stimulated by an external energy to promptly release stored chemical energy in a sudden emission of light and heat, which has high energy releasing rate and energy transforming efficiency since the scale of the composite components for nanoscale and the reaction mechanism based on the interaction between molecules. This multilayer composite film can be prepared by Complementary Metal-Oxide-Semiconductor (CMOS) compatible technology with magnetron sputtering, and can be integrated with circuit chips to construct micro-nano energetic devices. In this paper, the influence of processing parameters on the structure and properties of nano-reactive multilayer films is analyzed systematically. And the application of reactive multilayer films in micro igniter is also introduced. In addition, the application prospect and development direction of nano-reactive multilayer films in micro-nano energetic devices are prospected.

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纳米反应性多层膜及其在微能点火器中的应用综述

由纳米铝和纳米金属氧化物交替组成的纳米反应性多层膜是一种新型的纳米铝热剂。由于复合材料组分的尺度为纳米级，反应机理以分子间相互作用为基础，因此在外部能量的刺激下，这些多层膜能迅速释放储存的化学能，并以突然发射的光和热的形式释放出来，具有较高的能量释放率和能量转化效率。该多层复合薄膜可采用磁控溅射互补金属氧化物半导体（CMOS）兼容技术制备，并可与电路芯片集成，构建微纳能量器件。本文系统地分析了工艺参数对纳米多层反应膜结构和性能的影响。并介绍了反应性多层膜在微点火器中的应用。展望了纳米反应性多层膜在微纳能量器件中的应用前景和发展方向。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

FirePhysChem

CiteScore

1.40

自引率

0.00%

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