Subvolt high-speed free-space modulator with electro-optic metasurface

IF 34.9 1区材料科学 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY

Nature nanotechnology Pub Date : 2025-09-10 DOI:10.1038/s41565-025-02000-4

Go Soma, Koto Ariu, Seidai Karakida, Yusuke Tsubai, Takuo Tanemura

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Abstract

Active metasurfaces incorporating electro-optic materials enable high-speed free-space optical modulators that show great promise for a wide range of applications, including optical communication, sensing and computing. However, the limited light–matter interaction lengths in metasurfaces typically require high driving voltages exceeding tens of volts to achieve satisfactory modulation. Here we present low-voltage, high-speed free-space optical modulators based on silicon-organic-hybrid metasurfaces with dimerized-grating-based nanostructures. By exploiting a high-Q resonant mode, normally incident light is effectively trapped within a submicrometre-scale silicon slot region embedded with organic electro-optic material. Consequently, highly efficient modulation is obtained, enabling data transmission at 50 Mbps and 1.6 Gbps with driving voltages of only 0.2 V and 1 V, respectively. These metasurface modulators can now operate at complementary metal–oxide–semiconductor-compatible voltage levels, allowing energy-efficient high-speed practical applications of active metasurfaces.

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具有电光超表面的亚伏高速自由空间调制器

结合电光材料的有源超表面使高速自由空间光调制器具有广泛的应用前景，包括光通信，传感和计算。然而，超表面中有限的光-物质相互作用长度通常需要超过几十伏的高驱动电压才能实现令人满意的调制。在这里，我们提出了一种基于硅-有机杂化超表面和二聚化光栅纳米结构的低压、高速自由空间光调制器。通过利用高q谐振模式，正常入射光被有效地捕获在嵌入有机电光材料的亚微米级硅槽区域内。因此，可以获得高效的调制，在驱动电压分别仅为0.2 V和1 V的情况下，实现50 Mbps和1.6 Gbps的数据传输。这些超表面调制器现在可以在互补的金属氧化物半导体兼容电压水平下工作，从而实现有源超表面的节能高速实际应用。

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来源期刊

Nature nanotechnology 工程技术-材料科学：综合

CiteScore

59.70

自引率

0.80%

发文量

196

审稿时长

4-8 weeks

期刊介绍： Nature Nanotechnology is a prestigious journal that publishes high-quality papers in various areas of nanoscience and nanotechnology. The journal focuses on the design, characterization, and production of structures, devices, and systems that manipulate and control materials at atomic, molecular, and macromolecular scales. It encompasses both bottom-up and top-down approaches, as well as their combinations. Furthermore, Nature Nanotechnology fosters the exchange of ideas among researchers from diverse disciplines such as chemistry, physics, material science, biomedical research, engineering, and more. It promotes collaboration at the forefront of this multidisciplinary field. The journal covers a wide range of topics, from fundamental research in physics, chemistry, and biology, including computational work and simulations, to the development of innovative devices and technologies for various industrial sectors such as information technology, medicine, manufacturing, high-performance materials, energy, and environmental technologies. It includes coverage of organic, inorganic, and hybrid materials.