Flexible ZrNxOy thin-film cryogenic temperature sensor with low magnetoresistance for high-field applications

IF 2.1 3区工程技术 Q3 PHYSICS, APPLIED

Cryogenics Pub Date : 2025-09-04 DOI:10.1016/j.cryogenics.2025.104189

Zhen Geng , Zhicong Miao , Liancheng Xie , Hongwei Zhang , Di Jiang , Yemao Han , Rongjin Huang , Laifeng Li

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引用次数: 0

Abstract

Accurate and rapid temperature measurement in cryogenic, high-magnetic-field environments is critical for superconducting magnet applications where transient thermal events can jeopardize operational stability. Conventional rigid sensors struggle to conform to complex geometries, leading to measurement inaccuracies, which presents a significant challenge. This work introduces a flexible cryogenic temperature sensor based on ZrN_xO_y thin films deposited via sputtering on polyimide substrates with interdigitated gold electrodes. The sensor operates over a wide temperature range (2 − 300 K), achieving a maximum dimensionless sensitivity of 1.65 and a rapid thermal response time of 0.035 s under liquid nitrogen shock. Notably, within a 9 T magnetic field at cryogenic temperatures, the maximum temperature deviation was −0.92%, demonstrating significant potential for reducing strong magnetic field interference in monitoring transient temperature changes inside superconducting magnets.

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柔性ZrNxOy薄膜低温温度传感器，低磁阻，适用于高场应用

在低温、高磁场环境中进行准确、快速的温度测量对于超导磁体应用至关重要，因为瞬态热事件可能会危及运行稳定性。传统的刚性传感器难以适应复杂的几何形状，导致测量不准确，这是一个重大挑战。本工作介绍了一种基于ZrNxOy薄膜的柔性低温传感器，该薄膜是通过溅射沉积在聚酰亚胺衬底上的，并带有互指金电极。该传感器工作温度范围宽（2 ~ 300 K），最大无量纲灵敏度为1.65，液氮冲击下的快速热响应时间为0.035 s。值得注意的是，在低温下9 T磁场下，最大温度偏差为- 0.92%，显示出在监测超导磁体内部瞬态温度变化时减少强磁场干扰的显著潜力。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Cryogenics 物理-热力学

CiteScore

3.80

自引率

9.50%

发文量

审稿时长

2.1 months

期刊介绍： Cryogenics is the world''s leading journal focusing on all aspects of cryoengineering and cryogenics. Papers published in Cryogenics cover a wide variety of subjects in low temperature engineering and research. Among the areas covered are: - Applications of superconductivity: magnets, electronics, devices - Superconductors and their properties - Properties of materials: metals, alloys, composites, polymers, insulations - New applications of cryogenic technology to processes, devices, machinery - Refrigeration and liquefaction technology - Thermodynamics - Fluid properties and fluid mechanics - Heat transfer - Thermometry and measurement science - Cryogenics in medicine - Cryoelectronics