Precision laser ablation of dielectric layers: Unveiling multi-parameter synergy for industrial-compatible, low-damage processing

IF 6.3 2区材料科学 Q2 ENERGY & FUELS

Solar Energy Materials and Solar Cells Pub Date : 2025-09-08 DOI:10.1016/j.solmat.2025.113945

Jia Zheng , Zehao Zhang , Zuozuo Wu , Guixiu Li , Shiyang Sun , Jiabin Lu , Degong Ding , Shunan Chen , Chenyang Yu , Shuai Yuan , Jianwei Cao , Deren Yang

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引用次数: 0

Abstract

This study demonstrates UV femtosecond laser processing (345 nm, 350 fs) as an efficient method for dielectric patterning in TOPCon solar cells, revealing dual ablation mechanisms: textured fronts form laser-induced periodic surface structures (LIPSS) at moderate fluence (0.076 J/cm²), while planar rears exhibit peripheral dielectric delamination and central two-photon etching. Pulse widths (350 fs-2 ps) negligibly affect morphology, confirming non-thermal ablation. Chemical analyses show SiN_x decomposition (nitrogen depletion: 45.7 %→2.4 %) and surface oxidation. Optimized pulse overlap (≤50 %) enhances LIPSS, while a low-damage fluence window (0.068–0.076 J/cm²) ensures low destructiveness of the silicon-based surface structure. These findings provide a scalable, precision laser-processing framework for advanced solar cell manufacturing.

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介质层的精密激光烧蚀：揭示多参数协同工业兼容，低损伤加工

本研究证明了紫外飞秒激光处理（345 nm, 350 fs）是一种有效的TOPCon太阳能电池的介电图图化方法，揭示了双重烧蚀机制：纹理正面在中等能量（0.076 J/cm2）下形成激光诱导的周期性表面结构（LIPSS），而平面背面则表现出外围介电分层和中心双光子蚀刻。脉冲宽度（350fs - 2ps）对形态的影响可以忽略不计，证实了非热消融。化学分析显示SiNx分解（氮损耗：45.7%→2.4%）和表面氧化。优化的脉冲重叠（≤50%）增强了LIPSS，而低损伤影响窗口（0.068-0.076 J/cm2）确保了硅基表面结构的低破坏性。这些发现为先进的太阳能电池制造提供了一个可扩展的、精确的激光加工框架。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Solar Energy Materials and Solar Cells 工程技术-材料科学：综合

CiteScore

12.60

自引率

11.60%

发文量

513

审稿时长

47 days

期刊介绍： Solar Energy Materials & Solar Cells is intended as a vehicle for the dissemination of research results on materials science and technology related to photovoltaic, photothermal and photoelectrochemical solar energy conversion. Materials science is taken in the broadest possible sense and encompasses physics, chemistry, optics, materials fabrication and analysis for all types of materials.