Reduction of Nonuniformity of the Magnetic Field of an Elongated Magnetron Sputtering System with a Rotating Cathode

Abstract

The study of the distribution of the magnetic field over the surface of the magnetic system in the cylindrical magnetron is performed. It is shown that the use of a shunt made of magnetic steel of grade SUS 420 J2 allows increasing the uniformity of the resulting magnetic field, which directly affects the uniformity of the sputtered coatings. Furthermore, the thickness of the shunt does not affect its leveling ability and the magnitude of the magnetic induction over the magnetic poles decreases with an increase in its thickness. The results of physical and mathematical modeling are confirmed experimentally.