Comprehensive characterization of DLC films: Comparative insights from NEXAFS and SXES

IF 5.1 3区材料科学 Q2 MATERIALS SCIENCE, COATINGS & FILMS

Diamond and Related Materials Pub Date : 2025-08-26 DOI:10.1016/j.diamond.2025.112762

Thitikorn Chamchuang , Tsuneo Suzuki , Sarayut Tunmee , Praphaphon Silawong , Peng Guo , Aiying Wang , Kazuhiro Kanda , Keiji Komatsu , Hidetoshi Saitoh

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引用次数: 0

Abstract

Our study focuses on the comparative insights gained from near-edge X-ray absorption fine structure (NEXAFS) and soft X-ray emission spectroscopy (SXES) techniques in the comprehensive characterization of diamond-like carbon (DLC) films. Understanding the quantitative determination of carbon hybridization is essential for unraveling the relationships between structure and properties in carbon-based materials, including DLC films. Although several technologies exist for characterizing the sp³ and sp² carbon content in these materials, our study reveals that direct comparisons of analytical results are limited, highlighting the need for further research and development in this area. This study compares NEXAFS spectra with SXES data for a range of amorphous carbon coatings, including both hydrogen-free and hydrogenated DLC films with varying hydrogen content levels. Our findings highlight the crucial role of hydrogen in modifying the local electronic structure and the sp³/sp² ratios, which have a significant impact on the properties of the films. Films with low hydrogen content demonstrated strong agreement between NEXAFS and SXES results, while hydrogen-rich films exhibited discrepancies due to the influence of hydrogen on the electronic structure. These results highlight the importance of precise characterization and deposition control in the creation of DLC films for advanced applications.

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DLC薄膜的综合表征：NEXAFS和SXES的比较见解

我们的研究集中在近边缘x射线吸收精细结构（NEXAFS）和软x射线发射光谱（SXES）技术在类金刚石（DLC）薄膜综合表征中的比较见解。了解碳杂化的定量测定对于揭示包括DLC薄膜在内的碳基材料的结构和性能之间的关系至关重要。虽然有几种技术可以表征这些材料中的sp3和sp2碳含量，但我们的研究表明，直接比较分析结果是有限的，突出了该领域进一步研究和发展的必要性。本研究比较了NEXAFS光谱与SXES数据对一系列非晶碳涂层，包括氢含量不同的无氢和氢化DLC膜。我们的发现强调了氢在改变局部电子结构和sp3/sp2比率方面的关键作用，这对薄膜的性能有重大影响。低氢含量薄膜的NEXAFS结果与SXES结果一致，而富氢薄膜由于氢对电子结构的影响而出现差异。这些结果突出了精确表征和沉积控制在DLC薄膜制造中的重要性。

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来源期刊

Diamond and Related Materials 工程技术-材料科学：综合

CiteScore

6.00

自引率

14.60%

发文量

702

审稿时长

2.1 months

期刊介绍： DRM is a leading international journal that publishes new fundamental and applied research on all forms of diamond, the integration of diamond with other advanced materials and development of technologies exploiting diamond. The synthesis, characterization and processing of single crystal diamond, polycrystalline films, nanodiamond powders and heterostructures with other advanced materials are encouraged topics for technical and review articles. In addition to diamond, the journal publishes manuscripts on the synthesis, characterization and application of other related materials including diamond-like carbons, carbon nanotubes, graphene, and boron and carbon nitrides. Articles are sought on the chemical functionalization of diamond and related materials as well as their use in electrochemistry, energy storage and conversion, chemical and biological sensing, imaging, thermal management, photonic and quantum applications, electron emission and electronic devices. The International Conference on Diamond and Carbon Materials has evolved into the largest and most well attended forum in the field of diamond, providing a forum to showcase the latest results in the science and technology of diamond and other carbon materials such as carbon nanotubes, graphene, and diamond-like carbon. Run annually in association with Diamond and Related Materials the conference provides junior and established researchers the opportunity to exchange the latest results ranging from fundamental physical and chemical concepts to applied research focusing on the next generation carbon-based devices.