L. Córdova-Castillo , I. Camps , A. Figueroa , S. Cuevas
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引用次数: 0
Abstract
A theoretical and experimental study of a low-temperature DC glow discharge in the annular region of coaxial cylinders is presented. Plasma density was modified by varying the applied voltage and the neutral gas pressure. The ion density, mean electron energy, and plasma potential profiles were reconstructed through local measurements with the Langmuir probe technique along the radial direction. A one-dimensional asymptotic solution of a low-temperature plasma is presented that considers nonlinear effects and non-constant electronic temperature, which are neglected in most analytical solutions found in the literature. Additionally, a high-order spectral numerical solution was developed. Both analytical and numerical results agree qualitatively with the experimental observations.
期刊介绍:
Vacuum is an international rapid publications journal with a focus on short communication. All papers are peer-reviewed, with the review process for short communication geared towards very fast turnaround times. The journal also published full research papers, thematic issues and selected papers from leading conferences.
A report in Vacuum should represent a major advance in an area that involves a controlled environment at pressures of one atmosphere or below.
The scope of the journal includes:
1. Vacuum; original developments in vacuum pumping and instrumentation, vacuum measurement, vacuum gas dynamics, gas-surface interactions, surface treatment for UHV applications and low outgassing, vacuum melting, sintering, and vacuum metrology. Technology and solutions for large-scale facilities (e.g., particle accelerators and fusion devices). New instrumentation ( e.g., detectors and electron microscopes).
2. Plasma science; advances in PVD, CVD, plasma-assisted CVD, ion sources, deposition processes and analysis.
3. Surface science; surface engineering, surface chemistry, surface analysis, crystal growth, ion-surface interactions and etching, nanometer-scale processing, surface modification.
4. Materials science; novel functional or structural materials. Metals, ceramics, and polymers. Experiments, simulations, and modelling for understanding structure-property relationships. Thin films and coatings. Nanostructures and ion implantation.