Design and analysis of a spectral imaging detection instrument based on a digital micromirror device†

Abstract

We present the design of a spectral imaging inspection instrument based on a Digital Micromirror Device (DMD). The instrument utilizes an enhanced optical path that is compatible with the near-ultraviolet spectrum. The optical path design leverages the flexibility and high reliability of DMDs to enable precise control over spatial light modulation and spectral wavelength selection. Additionally, we evaluated the instrument's spectral range and spatial resolution using a mercury lamp and a resolution plate. The results indicate that the instrument operates within the 250–500 nm range, with a spatial resolution of up to 35 μm. Finally, we use the plasma generated by the Laser-Induced Breakdown Spectroscopy (LIBS) instrument as the observed sample. Instrumental observations reveal subtle spatio-temporal variations in the plasma across different spectral lines.