Unveiling the mechano-chemical synergy of AMP derivatives as multi-functional pH regulators on C-, R-, and M-plane sapphire CMP via experiments and DFT calculations
Bin Hu , Xinhuan Niu , Jiakai Zhou , Changxin Dong , Chao He , Xinjie Li , Zheng Wu , Jiahui Li
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引用次数: 0
Abstract
The development of sapphire slurry follows the principles of compositional simplification, environmental sustainability, and high efficiency with low cost. This study systematically investigated the effects of polyhydroxyamine pH regulators, 2-amino-2-methyl-1-propanol (AMP), 2-amino-2-methyl-1,3-propanediol (AMPD), and tris(hydroxymethyl)aminomethane (TRIS), on the polishing performance of C-, R-, and M-plane sapphire substrates. The results demonstrated that TRIS exhibited the highest efficacy, achieving material removal rates (MRRs) of 5.512 µm/h, 3.422 µm/h, and 4.541 µm/h for C-, R-, and M-plane sapphire, respectively, while reducing surface roughness (Sq) to 0.191 nm, 0.178 nm, and 0.184 nm. Tribological analysis, SEM characterization, zeta potential measurements, particle size distribution tests, and spectroscopic techniques (UV-Vis, XPS, and FTIR) were employed to elucidate the mechanical and chemical mechanisms governing material removal. All three pH regulators can also function as complexing agents, forming complexes with , with TRIS demonstrating the strongest chelation capability. Density functional theory (DFT) calculations further verified these findings, revealing that TRIS possesses the highest number of reactive sites. The consistency between computational and experimental results established a quantitative structure-performance relationship. This work provides a green and efficient paradigm for the precision machining of hard, brittle materials.
期刊介绍:
Tribology is the science of rubbing surfaces and contributes to every facet of our everyday life, from live cell friction to engine lubrication and seismology. As such tribology is truly multidisciplinary and this extraordinary breadth of scientific interest is reflected in the scope of Tribology International.
Tribology International seeks to publish original research papers of the highest scientific quality to provide an archival resource for scientists from all backgrounds. Written contributions are invited reporting experimental and modelling studies both in established areas of tribology and emerging fields. Scientific topics include the physics or chemistry of tribo-surfaces, bio-tribology, surface engineering and materials, contact mechanics, nano-tribology, lubricants and hydrodynamic lubrication.