Recent Advances in Atomic Force Microscopy-Based Local Anodic Oxidation Nanolithography of 2D Materials (Adv. Mater. Interfaces 16/2025)

IF 4.4 3区材料科学 Q2 CHEMISTRY, MULTIDISCIPLINARY

Advanced Materials Interfaces Pub Date : 2025-08-25 DOI:10.1002/admi.70077

Jing Yu, Abdulsalam Aji Suleiman, Jing-Wen Shi, Ruey Jinq Ong, Francis Chi-Chung Ling, Weiwen Zhang

{"title":"Recent Advances in Atomic Force Microscopy-Based Local Anodic Oxidation Nanolithography of 2D Materials (Adv. Mater. Interfaces 16/2025)","authors":"Jing Yu, Abdulsalam Aji Suleiman, Jing-Wen Shi, Ruey Jinq Ong, Francis Chi-Chung Ling, Weiwen Zhang","doi":"10.1002/admi.70077","DOIUrl":null,"url":null,"abstract":"<p><b>Atomic Force Microscopy-Based Local Anodic Oxidation</b></p><p>Atomic force microscopy (AFM)-based local anodic oxidation (LAO) is a low-cost method that avoids photoresist residues and can etch, oxidize, or alter material properties. This review summarizes the development of AFM LAO technology for 2D materials, discussing its reaction mechanisms, applications, and influencing factors. It covers the use of AFM LAO for nanolithography, oxidation, reduction, and device applications in materials like graphene, h-BN, TMDs, BP, and oxides. The review also examines the challenges and research gaps that remain, including technical obstacles and areas requiring further exploration. Finally, it offers insights into the future prospects of AFM LAO in 2D material-based nano-designs and devices, highlighting both its potential advantages and limitations. More details can be found in article 2500137 by Francis Chi-Chung Ling, Weiwen Zhang, and co-workers.\n\n <figure>\n <div><picture>\n <source></source></picture><p></p>\n </div>\n </figure></p>","PeriodicalId":115,"journal":{"name":"Advanced Materials Interfaces","volume":"12 16","pages":""},"PeriodicalIF":4.4000,"publicationDate":"2025-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://advanced.onlinelibrary.wiley.com/doi/epdf/10.1002/admi.70077","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Advanced Materials Interfaces","FirstCategoryId":"88","ListUrlMain":"https://advanced.onlinelibrary.wiley.com/doi/10.1002/admi.70077","RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"CHEMISTRY, MULTIDISCIPLINARY","Score":null,"Total":0}

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Abstract

Atomic Force Microscopy-Based Local Anodic Oxidation

Atomic force microscopy (AFM)-based local anodic oxidation (LAO) is a low-cost method that avoids photoresist residues and can etch, oxidize, or alter material properties. This review summarizes the development of AFM LAO technology for 2D materials, discussing its reaction mechanisms, applications, and influencing factors. It covers the use of AFM LAO for nanolithography, oxidation, reduction, and device applications in materials like graphene, h-BN, TMDs, BP, and oxides. The review also examines the challenges and research gaps that remain, including technical obstacles and areas requiring further exploration. Finally, it offers insights into the future prospects of AFM LAO in 2D material-based nano-designs and devices, highlighting both its potential advantages and limitations. More details can be found in article 2500137 by Francis Chi-Chung Ling, Weiwen Zhang, and co-workers.

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基于原子力显微镜的二维材料局部阳极氧化纳米光刻技术研究进展。接口16/2025)

基于原子力显微镜的局部阳极氧化基于原子力显微镜（AFM）的局部阳极氧化（LAO）是一种低成本的方法，可以避免光刻胶残留，并且可以蚀刻，氧化或改变材料性质。本文综述了二维材料AFM LAO技术的研究进展，讨论了其反应机理、应用及影响因素。它涵盖了在石墨烯、h-BN、tmd、BP和氧化物等材料中使用AFM LAO进行纳米光刻、氧化、还原和器件应用。该审查还审查了仍然存在的挑战和研究差距，包括技术障碍和需要进一步探索的领域。最后，它提供了对AFM LAO在二维材料纳米设计和器件中的未来前景的见解，突出了其潜在的优势和局限性。更多细节可以在Francis Chi-Chung Ling， Weiwen Zhang及其同事的文章2500137中找到。

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来源期刊

Advanced Materials Interfaces CHEMISTRY, MULTIDISCIPLINARY-MATERIALS SCIENCE, MULTIDISCIPLINARY

CiteScore

8.40

自引率

5.60%

发文量

1174

审稿时长

1.3 months

期刊介绍： Advanced Materials Interfaces publishes top-level research on interface technologies and effects. Considering any interface formed between solids, liquids, and gases, the journal ensures an interdisciplinary blend of physics, chemistry, materials science, and life sciences. Advanced Materials Interfaces was launched in 2014 and received an Impact Factor of 4.834 in 2018. The scope of Advanced Materials Interfaces is dedicated to interfaces and surfaces that play an essential role in virtually all materials and devices. Physics, chemistry, materials science and life sciences blend to encourage new, cross-pollinating ideas, which will drive forward our understanding of the processes at the interface. Advanced Materials Interfaces covers all topics in interface-related research: Oil / water separation, Applications of nanostructured materials, 2D materials and heterostructures, Surfaces and interfaces in organic electronic devices, Catalysis and membranes, Self-assembly and nanopatterned surfaces, Composite and coating materials, Biointerfaces for technical and medical applications. Advanced Materials Interfaces provides a forum for topics on surface and interface science with a wide choice of formats: Reviews, Full Papers, and Communications, as well as Progress Reports and Research News.