Practical Guidance on Selecting Analytical Methods for PFAS in Semiconductor Manufacturing Wastewater

IF 4.6 Q1 CHEMISTRY, ANALYTICAL

ACS Measurement Science Au Pub Date : 2025-06-20 DOI:10.1021/acsmeasuresciau.5c00021

Boris Droz, Christopher G. Heron, Mitchell L. Kim-Fu, Patrick N. Reardon, Mireia Roig-Paul and Jennifer A. Field*,

{"title":"Practical Guidance on Selecting Analytical Methods for PFAS in Semiconductor Manufacturing Wastewater","authors":"Boris Droz, Christopher G. Heron, Mitchell L. Kim-Fu, Patrick N. Reardon, Mireia Roig-Paul and Jennifer A. Field*, ","doi":"10.1021/acsmeasuresciau.5c00021","DOIUrl":null,"url":null,"abstract":"<p >The focus of this review is to provide an overview of the nomenclature, structure, and properties of perfluoroalkyl and polyfluoroalkyl substances (PFAS) that dictate the selection of analytical methods for analyzing PFAS in treated semiconductor wastewater. The review is organized by introducing the fundamental concepts of how structure dictates the physical-chemical properties of PFAS and how these properties determine the suitability and applicability of standardized analytical methods for individual PFAS as well as methods for total fluorine. Structures for PFAS measured in semiconductor wastewater or known to be in use by industry are given with tables intended as guidance for method selection. This review includes current guidance on sample collection, storage, and handling along with a comparison of U.S. Environmental Protection Agency and American Society for Testing and Materials analytical methods for target PFAS as well as methods for ultrashort PFAS. Methods are reviewed for volatile PFAS in wastewater as well as workflows for suspect and nontarget nonvolatile and volatile PFAS. Nonspecific methods for PFAS including the total oxidizable precursor assay, total fluorine analyses, and extractable and adsorbable organic fluorine assays are reviewed. Alternative detectors for total fluorine are reviewed along with nuclear magnetic resonance spectroscopy and sensors for online wastewater monitoring.</p>","PeriodicalId":29800,"journal":{"name":"ACS Measurement Science Au","volume":"5 4","pages":"399–423"},"PeriodicalIF":4.6000,"publicationDate":"2025-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://pubs.acs.org/doi/pdf/10.1021/acsmeasuresciau.5c00021","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"ACS Measurement Science Au","FirstCategoryId":"1085","ListUrlMain":"https://pubs.acs.org/doi/10.1021/acsmeasuresciau.5c00021","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"CHEMISTRY, ANALYTICAL","Score":null,"Total":0}

引用次数: 0

Abstract

The focus of this review is to provide an overview of the nomenclature, structure, and properties of perfluoroalkyl and polyfluoroalkyl substances (PFAS) that dictate the selection of analytical methods for analyzing PFAS in treated semiconductor wastewater. The review is organized by introducing the fundamental concepts of how structure dictates the physical-chemical properties of PFAS and how these properties determine the suitability and applicability of standardized analytical methods for individual PFAS as well as methods for total fluorine. Structures for PFAS measured in semiconductor wastewater or known to be in use by industry are given with tables intended as guidance for method selection. This review includes current guidance on sample collection, storage, and handling along with a comparison of U.S. Environmental Protection Agency and American Society for Testing and Materials analytical methods for target PFAS as well as methods for ultrashort PFAS. Methods are reviewed for volatile PFAS in wastewater as well as workflows for suspect and nontarget nonvolatile and volatile PFAS. Nonspecific methods for PFAS including the total oxidizable precursor assay, total fluorine analyses, and extractable and adsorbable organic fluorine assays are reviewed. Alternative detectors for total fluorine are reviewed along with nuclear magnetic resonance spectroscopy and sensors for online wastewater monitoring.

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半导体制造废水中PFAS分析方法选择的实用指南

本文综述了全氟烷基和多氟烷基物质（PFAS）的命名、结构和性质，为分析经处理的半导体废水中PFAS的分析方法的选择提供了依据。本次审查是通过介绍结构如何决定PFAS的物理化学性质以及这些性质如何决定单个PFAS以及总氟方法的标准化分析方法的适用性和适用性的基本概念来组织的。在半导体废水中测量的PFAS结构或已知在工业中使用的PFAS结构给出了用于指导方法选择的表格。本综述包括样品收集、储存和处理的现行指南，以及美国环境保护署和美国测试和材料协会对目标PFAS的分析方法以及超短PFAS的方法的比较。综述了废水中挥发性PFAS的方法，以及可疑和非目标非挥发性和挥发性PFAS的工作流程。综述了PFAS的非特异性方法，包括总氧化前体测定、总氟分析、可提取和可吸附有机氟测定。综述了总氟的替代检测器以及核磁共振波谱和在线废水监测传感器。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

ACS Measurement Science Au 化学计量学-

CiteScore

5.20

自引率

0.00%

发文量

期刊介绍： ACS Measurement Science Au is an open access journal that publishes experimental computational or theoretical research in all areas of chemical measurement science. Short letters comprehensive articles reviews and perspectives are welcome on topics that report on any phase of analytical operations including sampling measurement and data analysis. This includes:Chemical Reactions and SelectivityChemometrics and Data ProcessingElectrochemistryElemental and Molecular CharacterizationImagingInstrumentationMass SpectrometryMicroscale and Nanoscale systemsOmics (Genomics Proteomics Metabonomics Metabolomics and Bioinformatics)Sensors and Sensing (Biosensors Chemical Sensors Gas Sensors Intracellular Sensors Single-Molecule Sensors Cell Chips Arrays Microfluidic Devices)SeparationsSpectroscopySurface analysisPapers dealing with established methods need to offer a significantly improved original application of the method.