Direct laser transfer and thermocompression bonding process of blue GaN micro-LED arrays

IF 3.6 2区物理与天体物理 Q2 PHYSICS, APPLIED

Applied Physics Letters Pub Date : 2025-08-07 DOI:10.1063/5.0272689

Zhu Yang, Xiaoxiao Ji, Haojie Zhou, Guoxu Fang, Min Wu, Xinyi Wang, Xiuzhen Lu, Luqiao Yin, Jianhua Zhang

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引用次数: 0

Abstract

Large-scale production of micro-LED displays encounters significant technical challenges, particularly in the mass transfer process of micro-LEDs. This study innovatively explores the direct laser transfer process of blue GaN micro-LED arrays utilizing rubber tape as the receiving material, which essentially involves a selective laser liftoff technique to transfer micro-LEDs directly from their growth substrate to the target substrate. The coherent UV transfer system with a laser wavelength of 248 nm was used in this Letter. Notably, a 30 × 15 micro-LED array, including the word “SHU,” was transferred and displayed. The micro-LEDs were interconnected to the substrate through thermocompression bonding. A comparative analysis of the photoelectric properties of the micro-LEDs before and after transfer was conducted, and the shear force after bonding was analyzed. The experimental results demonstrate that this direct laser transfer technique achieves high yield and precise transfer of micro-LEDs with little impact on their photoelectric and mechanical performance, exhibiting excellent display characteristics. This study provides valuable insights for advancing the further development and commercialization of micro-LED technology.

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蓝色GaN微led阵列的直接激光转移和热压键合工艺

微型led显示屏的大规模生产面临着重大的技术挑战，特别是在微型led的传质过程中。本研究创新性地探索了利用橡胶带作为接收材料的蓝色GaN微型led阵列的直接激光转移工艺，该工艺本质上涉及选择性激光发射技术，将微型led直接从其生长衬底转移到目标衬底。本文采用激光波长为248 nm的相干紫外转移系统。值得注意的是，一个30 × 15的微型led阵列被转移并显示，其中包括“SHU”字样。微型led通过热压键连接到衬底上。对比分析了传递前后微型led的光电性能，并分析了键合后的剪切力。实验结果表明，这种直接激光转移技术在对微型led光电性能和机械性能影响很小的情况下，实现了高良率和高精度的微型led转移，具有优异的显示特性。本研究为推动微型led技术的进一步发展和商业化提供了有价值的见解。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Applied Physics Letters 物理-物理：应用

CiteScore

6.40

自引率

10.00%

发文量

1821

审稿时长

1.6 months

期刊介绍： Applied Physics Letters (APL) features concise, up-to-date reports on significant new findings in applied physics. Emphasizing rapid dissemination of key data and new physical insights, APL offers prompt publication of new experimental and theoretical papers reporting applications of physics phenomena to all branches of science, engineering, and modern technology. In addition to regular articles, the journal also publishes invited Fast Track, Perspectives, and in-depth Editorials which report on cutting-edge areas in applied physics. APL Perspectives are forward-looking invited letters which highlight recent developments or discoveries. Emphasis is placed on very recent developments, potentially disruptive technologies, open questions and possible solutions. They also include a mini-roadmap detailing where the community should direct efforts in order for the phenomena to be viable for application and the challenges associated with meeting that performance threshold. Perspectives are characterized by personal viewpoints and opinions of recognized experts in the field. Fast Track articles are invited original research articles that report results that are particularly novel and important or provide a significant advancement in an emerging field. Because of the urgency and scientific importance of the work, the peer review process is accelerated. If, during the review process, it becomes apparent that the paper does not meet the Fast Track criterion, it is returned to a normal track.