Tungsten peak broadening in LEIS: Origins and challenges for quantitative analysis

IF 1.4 3区物理与天体物理 Q3 INSTRUMENTS & INSTRUMENTATION

Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms Pub Date : 2025-07-29 DOI:10.1016/j.nimb.2025.165823

N. Efimov , D. Sinelnikov , M. Grishaev , I. Nikitin , V. Luzanov

{"title":"Tungsten peak broadening in LEIS: Origins and challenges for quantitative analysis","authors":"N. Efimov , D. Sinelnikov , M. Grishaev , I. Nikitin , V. Luzanov","doi":"10.1016/j.nimb.2025.165823","DOIUrl":null,"url":null,"abstract":"<div><div>This study presents the energy spectra of 15 keV Ne<sup>+</sup> ions scattered from the surface of polycrystalline tungsten during its thermal annealing in the temperature range from 560 °C to 2500 °C. Before the heating, the energy spectra for tungsten exhibit significant broadening; however, annealing results in a narrowing of the tungsten peaks, making them comparable to the typical spectra observed for gold. This narrowing of the elastic peak, along with the observed increase in the total scattering coefficient and disappearance of oxygen peaks, is attributed to the removal of the oxidized surface layer. Additionally, a quantitative LEIS analysis of W-Si striped films with well-known relative atomic surface concentrations is conducted. The influence of the surface condition of tungsten reference samples on quantitative LEIS analysis is examined and discussed.</div></div>","PeriodicalId":19380,"journal":{"name":"Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms","volume":"567 ","pages":"Article 165823"},"PeriodicalIF":1.4000,"publicationDate":"2025-07-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms","FirstCategoryId":"101","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0168583X25002137","RegionNum":3,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"INSTRUMENTS & INSTRUMENTATION","Score":null,"Total":0}

引用次数: 0

Abstract

This study presents the energy spectra of 15 keV Ne⁺ ions scattered from the surface of polycrystalline tungsten during its thermal annealing in the temperature range from 560 °C to 2500 °C. Before the heating, the energy spectra for tungsten exhibit significant broadening; however, annealing results in a narrowing of the tungsten peaks, making them comparable to the typical spectra observed for gold. This narrowing of the elastic peak, along with the observed increase in the total scattering coefficient and disappearance of oxygen peaks, is attributed to the removal of the oxidized surface layer. Additionally, a quantitative LEIS analysis of W-Si striped films with well-known relative atomic surface concentrations is conducted. The influence of the surface condition of tungsten reference samples on quantitative LEIS analysis is examined and discussed.

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LEIS中钨峰展宽：定量分析的起源与挑战

本文研究了多晶钨在560 ~ 2500℃的热退火过程中，从表面散射的15个keV Ne+离子的能谱。加热前，钨的能谱明显展宽；然而，退火导致钨峰变窄，使它们与观察到的金的典型光谱相当。弹性峰的变窄，以及观测到的总散射系数的增加和氧峰的消失，都归因于氧化表面层的去除。此外，对已知相对原子表面浓度的W-Si条纹薄膜进行了定量LEIS分析。探讨了钨样品表面状况对定量LEIS分析的影响。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms 物理-核科学技术

CiteScore

2.80

自引率

7.70%

发文量

231

审稿时长

1.9 months

期刊介绍： Section B of Nuclear Instruments and Methods in Physics Research covers all aspects of the interaction of energetic beams with atoms, molecules and aggregate forms of matter. This includes ion beam analysis and ion beam modification of materials as well as basic data of importance for these studies. Topics of general interest include: atomic collisions in solids, particle channelling, all aspects of collision cascades, the modification of materials by energetic beams, ion implantation, irradiation - induced changes in materials, the physics and chemistry of beam interactions and the analysis of materials by all forms of energetic radiation. Modification by ion, laser and electron beams for the study of electronic materials, metals, ceramics, insulators, polymers and other important and new materials systems are included. Related studies, such as the application of ion beam analysis to biological, archaeological and geological samples as well as applications to solve problems in planetary science are also welcome. Energetic beams of interest include atomic and molecular ions, neutrons, positrons and muons, plasmas directed at surfaces, electron and photon beams, including laser treated surfaces and studies of solids by photon radiation from rotating anodes, synchrotrons, etc. In addition, the interaction between various forms of radiation and radiation-induced deposition processes are relevant.