An InGaAsSb Based 640 × 512 Focal Plane Array With Low Surface Leakage Current for Extended Shortwave Detection

IF 2.4 4区工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC

IEEE Photonics Journal Pub Date : 2025-07-08 DOI:10.1109/JPHOT.2025.3586862

Ruoyu Xie;Yifan Shan;Lingze Yao;Donghai Wu;Xiangbin Su;Hongyue Hao;Dongwei Jiang;Mengqi Yang;Ye Zhang;Hui Xie;Guowei Wang;Yingqiang Xu;Haiqiao Ni;Zhichuan Niu

引用次数: 0

Abstract

An extended-wavelength InGaAsSb focal plane array (FPA) with a 15 μm pixel pitch, 640 × 512 format, and a cutoff wavelength of 3.22 μm is demonstrated. Through the atomic layer deposition Al₂O₃ passivation technology, the natural oxide leakage channel is reduced and the leakage current of the device is well suppressed. The optoelectronic performance of the FPA is close to that of the large-scale test unit. At 180 K, the quantum efficiency of the FPA is 45.6% and the dark current is about 2.76 × 10⁻⁵ A/cm². Laboratory imaging shows potential for applications at temperatures above 200 K.

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基于InGaAsSb的640 × 512低表面漏电流焦平面阵列用于扩展短波探测

设计了一种宽波长InGaAsSb焦平面阵列（FPA），其像素间距为15 μm，格式为640 × 512，截止波长为3.22 μm。通过原子层沉积Al2O3钝化技术，减少了天然氧化物泄漏通道，很好地抑制了器件的泄漏电流。FPA的光电性能接近于大型测试单元的光电性能。在180 K时，FPA的量子效率为45.6%，暗电流约为2.76 × 10−5 A/cm2。实验室成像显示在200 K以上的温度下应用的潜力。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

IEEE Photonics Journal ENGINEERING, ELECTRICAL & ELECTRONIC-OPTICS

CiteScore

4.50

自引率

8.30%

发文量

489

审稿时长

1.4 months

期刊介绍： Breakthroughs in the generation of light and in its control and utilization have given rise to the field of Photonics, a rapidly expanding area of science and technology with major technological and economic impact. Photonics integrates quantum electronics and optics to accelerate progress in the generation of novel photon sources and in their utilization in emerging applications at the micro and nano scales spanning from the far-infrared/THz to the x-ray region of the electromagnetic spectrum. IEEE Photonics Journal is an online-only journal dedicated to the rapid disclosure of top-quality peer-reviewed research at the forefront of all areas of photonics. Contributions addressing issues ranging from fundamental understanding to emerging technologies and applications are within the scope of the Journal. The Journal includes topics in: Photon sources from far infrared to X-rays, Photonics materials and engineered photonic structures, Integrated optics and optoelectronic, Ultrafast, attosecond, high field and short wavelength photonics, Biophotonics, including DNA photonics, Nanophotonics, Magnetophotonics, Fundamentals of light propagation and interaction; nonlinear effects, Optical data storage, Fiber optics and optical communications devices, systems, and technologies, Micro Opto Electro Mechanical Systems (MOEMS), Microwave photonics, Optical Sensors.