Effects of H2O vapor-assisted on focused ion beam milling of single-crystal diamond: Sputtering yield enhancement and damage suppression

IF 1.4 3区物理与天体物理 Q3 INSTRUMENTS & INSTRUMENTATION

Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms Pub Date : 2025-07-25 DOI:10.1016/j.nimb.2025.165816

Yu Yang , Quan-long Wang , Cheng-long Ma , Bang-jie Gu , Lun Chen , Lei Han

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Abstract

In this work, the sputtering yield and damage in single-crystal diamond were investigated using molecular dynamics simulations during H₂O vapor-assisted Focused Ion Beam (FIB) milling. A comparative analysis of FIB sputtering and vapor-assisted processes revealed that H₂O vapor increased the sputtering yield, while simultaneously suppressing the evolution of internal damage and graphitization in processing regions. The presence of H₂O vapor assisted in generating a broader stress variation region on the diamond surface and suppressed the diffusion of implanted ions, promoting their localized distribution. Mean-squared displacement (MSD) analysis further revealed that the presence of H2O vapor significantly reduced the displacement of carbon atoms in the processed region, resulting in greater processing stability and precision. These findings demonstrated the dual advantages of H₂O-assisted FIB in enhancing material removal efficiency and minimizing subsurface damage, offering theoretical insights and practical guidance for precision diamond machining.

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水蒸汽辅助聚焦离子束铣削单晶金刚石的影响：溅射成品率提高和损伤抑制

本文采用分子动力学模拟方法研究了水蒸汽辅助聚焦离子束（FIB）铣削过程中单晶金刚石的溅射率和损伤。通过对FIB溅射和蒸汽辅助工艺的对比分析发现，H2O蒸汽提高了溅射成品率，同时抑制了加工区域内部损伤和石墨化的发展。H2O蒸气的存在有助于在金刚石表面产生更宽的应力变化区域，抑制注入离子的扩散，促进其局部分布。均方位移（MSD）分析进一步表明，H2O蒸气的存在显著降低了加工区域中碳原子的位移，从而提高了加工的稳定性和精度。这些发现证明了h2o辅助FIB在提高材料去除效率和减少亚表面损伤方面的双重优势，为精密金刚石加工提供了理论见解和实践指导。

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来源期刊

Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms 物理-核科学技术

CiteScore

2.80

自引率

7.70%

发文量

231

审稿时长

1.9 months

期刊介绍： Section B of Nuclear Instruments and Methods in Physics Research covers all aspects of the interaction of energetic beams with atoms, molecules and aggregate forms of matter. This includes ion beam analysis and ion beam modification of materials as well as basic data of importance for these studies. Topics of general interest include: atomic collisions in solids, particle channelling, all aspects of collision cascades, the modification of materials by energetic beams, ion implantation, irradiation - induced changes in materials, the physics and chemistry of beam interactions and the analysis of materials by all forms of energetic radiation. Modification by ion, laser and electron beams for the study of electronic materials, metals, ceramics, insulators, polymers and other important and new materials systems are included. Related studies, such as the application of ion beam analysis to biological, archaeological and geological samples as well as applications to solve problems in planetary science are also welcome. Energetic beams of interest include atomic and molecular ions, neutrons, positrons and muons, plasmas directed at surfaces, electron and photon beams, including laser treated surfaces and studies of solids by photon radiation from rotating anodes, synchrotrons, etc. In addition, the interaction between various forms of radiation and radiation-induced deposition processes are relevant.