Rational design of high-performance dual-channel-layered InAlZnO thin-film transistors for low power and transparent electronics

IF 6.3 2区材料科学 Q2 CHEMISTRY, PHYSICAL

Applied Surface Science Pub Date : 2025-07-21 DOI:10.1016/j.apsusc.2025.164113

Genglong Zhao, Ablat Abliz

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Abstract

In this study, InAlZnO (IAZO) based oxide films and related thin-film transistors (TFTs) were prepared using RF magnetron sputtering. The effects of different Al contents on the oxygen vacancy defects, optical properties, and performance of single- and dual-channel-layered IAZO TFTs were investigated. The experimental results showed that optimized dual-channel-layered IAZO(1:0.1:1)/ IAZO(1:0.3:1) TFTs obtained a high carrier field-effect mobility (μ_FE) of 42.3 cm²/Vs, a subthreshold swing (SS) of 131 mV dec^-1 and an I_on/I_off of 1.6 × 10⁷. Meanwhile, the light illumination stress stability of the dual-channel-layered IAZO TFTs was significantly enhanced. This was because the 0.1 % Al content IAZO film was utilized as the front layer of the TFT to provide high carrier concentration (N_e) and increase mobility, whereas the 0.3 % Al content IAZO film was used as the back layer of the TFT to control the channel conductance and trap density. X-ray photoelectron spectroscopy and electron paramagnetic resonance analysis revealed that the number of oxygen vacancies decreased with increasing Al content. Finally, a fully transparent dual-channel layered IAZO TFT was prepared with an ITO-glass substrate, and a high optical transparency of 90 %, small V_TH of 0.04 V, and high μ_FE of 39.7 cm²/Vs were achieved for applications in the field of transparent displays.

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用于低功耗和透明电子器件的高性能双通道分层InAlZnO薄膜晶体管的合理设计

本研究采用射频磁控溅射法制备了InAlZnO （IAZO）基氧化物薄膜和相关的薄膜晶体管（TFTs）。研究了不同Al含量对单通道和双通道层状IAZO tft的氧空位缺陷、光学性质和性能的影响。实验结果表明，优化后的双通道层状IAZO(1:0.1:1)/ IAZO(1:0.3:1) tft的载流子场效应迁移率（μFE）为42.3 cm2/Vs，亚阈值摆幅（SS）为131 mV / dec1，离子/离合（Ion/Ioff）为1.6 × 107。同时，双通道层状IAZO tft的光照应力稳定性显著增强。这是因为0.1 % Al含量的IAZO薄膜被用作TFT的前层，以提供高载流子浓度（Ne）并增加迁移率，而0.3 % Al含量的IAZO薄膜被用作TFT的后层，以控制通道电导和陷阱密度。x射线光电子能谱和电子顺磁共振分析表明，随着Al含量的增加，氧空位数量减少。最后，在ito玻璃衬底上制备了全透明双通道层状IAZO TFT，具有90% %的高光学透明度、0.04 V的小VTH和39.7 cm2/Vs的高μFE，可用于透明显示领域。

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来源期刊

Applied Surface Science 工程技术-材料科学：膜

CiteScore

12.50

自引率

7.50%

发文量

3393

审稿时长

67 days

期刊介绍： Applied Surface Science covers topics contributing to a better understanding of surfaces, interfaces, nanostructures and their applications. The journal is concerned with scientific research on the atomic and molecular level of material properties determined with specific surface analytical techniques and/or computational methods, as well as the processing of such structures.